Inertial microelectromechanical sensors – commonly abbreviated to inertial MEMS – have a history of more than two decades of intense research, development, and commercialization. Sometimes unperceived, they left the shadow of military and space-related utilities and entered daily life hidden in products surrounding us. Cars with airbag-release sensors and electronic stability control have become a matter of course. Activity monitoring of pacemaker patients and stabilization of platforms such as transport robots and cameras are now improving our quality of life. The creation of easy-to-use human–machine interfaces has helped many people to conquer complicated equipment around us, not only computer games. The penetration of inertial MEMS – often merged with other sensor systems – into new application areas is a trend that is still gaining momentum.

The intention of this book is to reflect the interdisciplinary complexity of inertial MEMS. It will try to give a systematic survey of the design, fabrication, and performance evaluation of MEMS-based inertial sensors, with emphasis on the practical problems arising from the impact of technological imperfections and of often harsh environmental conditions. A product going to the market has to be guaranteed to have a certain level of reliability against failure throughout its lifetime.

The basic concepts and the theoretical background of inertial measurements will be presented. However, the book has evolved not from academic activity but rather from conceptual and development work within industry. It is intended to address the symbiosis of practice and theory.