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High Speed Characterization of Pseudomorphic Hemt Structures Using a Very Low Noise Scintillation Detector
Published online by Cambridge University Press: 06 March 2019
Abstract
We show that a very low noise, high dynamic range scintillation detector has major advantages over conventional detectors for characterization of pseudomorphic HEMT structures by high resolution X-ray diffraction. We show that the reduced background enables a second modulation period to be detected, enabling the thickness and composition to be determined independently. Using a conventional X-ray generator and diffractometer we demonstrate that, in a single scan taking only 10 seconds, we are able to obtain sufficiently good data to provide quality assurance.
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- Research Article
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- Copyright © International Centre for Diffraction Data 1993
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