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Ultra-High Vacuum Grazing Incidence Small Angle X-Ray Scattering Camera for in Situ Surface Analysis

Published online by Cambridge University Press:  06 March 2019

Joanne Levine Parrill ,
Jerome B. Cohen  and
Yip-Wah Chung
Joanne Levine Parrill
Affiliation:
5759 Carufh Haven Lane Dallas, TX 75206
Jerome B. Cohen
Affiliation:
Department of Materials Science and Engineering, McCormick School of Engineering and Applied Science Northwestern University Evanston, IL 60208
Yip-Wah Chung
Affiliation:
Department of Materials Science and Engineering, McCormick School of Engineering and Applied Science Northwestern University Evanston, IL 60208
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Abstract

An ultra-high vacuum chamber designed for in situ grazing incidence small angle x-ray scattering (GISAXS) surface analysis is described. Unique features of this equipment are the precision rotary feedthrough for angular alignment of the sample, the sample heating design, the Be window arrangement, and the compatibility of this chamber with both a rotating anode and a synchrotron beamline. This chamber was used as part of a GISAXS camera utilizing a 18 kW Rigaku rotating anode, pin-hole collimation, and a position sensitive detector. The resolution of this camera was 0.007 A-1 with a 1.4 mm wide beamstop and CuKα

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 37: Forty-Second Annual Conference on Applications of X-ray Analysis, August 2-6, 1993 , 1993 , pp. 413 - 418
Copyright
Copyright © International Centre for Diffraction Data 1993

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