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High-Sensitivity ESCA Instrument

Published online by Cambridge University Press:  06 March 2019

R. D. Davies ,
H. K. Herglotz ,
J. D. Lee  and
H. L. Suchan
R. D. Davies
Affiliation:
Engineering Physics Laboratory, E. I. du Pont de Nemours & Co. (Inc.), Wilmington, Delaware
H. K. Herglotz
Affiliation:
Engineering Physics Laboratory, E. I. du Pont de Nemours & Co. (Inc.), Wilmington, Delaware
J. D. Lee
Affiliation:
Engineering Physics Laboratory, E. I. du Pont de Nemours & Co. (Inc.), Wilmington, Delaware
H. L. Suchan
Affiliation:
Engineering Physics Laboratory, E. I. du Pont de Nemours & Co. (Inc.), Wilmington, Delaware
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Abstract

A new ESCA (electron spectroscopy for chemical analysis) instrument has been developed to provide high sensitivity and efficient operation for laboratory analysis of composition and chemical bonding in very thin surface layers of solid samples. High sensitivity is achieved by means of the high-intensity, efficient X-ray source described by Davies and Herglotz at the 1968 Denver X-Ray Conference, in combination with the new electron energy analyzer described by Lee at the 1972 Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy. A sample chamber designed to provide for rapid introduction and replacement of samples has adequate facilities for various sample treatments and conditioning followed immediafely by ESCA analysis of the sample.

Examples of application are presented, demonstrating the sensitivity and resolution achievable with this instrument. Its usefulness in trace surface analysis is shown and some “chemical shifts” measured by the instrument are compared with those obtained by X-ray spectroscopy.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 16: 'Twenty-First Annual Conference on Applications of X-ray Analysis, August 2-4, 1972 , 1972 , pp. 90 - 101
Copyright
Copyright © International Centre for Diffraction Data 1972

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References

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