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Microstructural Characterization of Thin Polycrystalline Films by X-Ray Diffraction

Published online by Cambridge University Press:  06 March 2019

C.N.J. Wagner ,
M.S. Boldrick  and
L. Keller
C.N.J. Wagner
Affiliation:
Department of Materials Science and Engineering University of California, Los Angeles Los Angeles, CA 90024-1595
L. Keller
Affiliation:
Department of Materials Science and Engineering University of California, Los Angeles Los Angeles, CA 90024-1595
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Abstract

The Fourier analysis of the broadened profiles in a powder pattern allows the determination of the effective particle or domain size and the microstrains within each domain in polycrystalline materials. In order to apply this method to the diffraction patterns of thin films and coatings, deposited on crystalline or amorphous substrates, special diffraction techniques must be employed for the registration of the relatively weak intensities. The fitting of the experimental profiles to pseudo-Voigt functions permits the recovery of the peak tails and a precise determination of the background. The positions of the peak maxima or centroids yield information about any compositional variations, and about the occurrence of stacking faults and residual stresses in thin films and coatings.

Type
II. Characterization of Thin Films by XRD and XRF
Information
Advances in X-Ray Analysis , Volume 31: Thirty-Sixth Annual Conference on Applications of X-ray Analysis, August 3-7, 1987 , 1987 , pp. 129 - 142
Copyright
Copyright © International Centre for Diffraction Data 1987

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References

Adler, R.P.I., Otte, H.M., and Wagner, C.N.J., 1970, “Determination of Dislocation Density and Stacking Fault Probability from X-Ray Powder Pattern Peak Profiles”, Met, Transactions. 1: 2375–2382 Google Scholar
Cullity, B.D., 1976, Elements of X-Ray Diffraction. 2nd Edition, Addison-Wesley, Reading, MA.Google Scholar
Enzo, S., and Parrish, W. 1984, “A Method of Background Subtraction for the Analysis of Broadened Profiles”, Adv. X-Ray Analysis. 27: 37–44.Google Scholar
Enzo, S., Polizzi, S., and Benedetti, A., 1985, “Applications of fitting techniques to the Warren-Averbach method for X-ray line broadening analysis”, Z. Kristallosrarthie. 170: 275–287.Google Scholar
Guinier, A. 1963, X-Ray Diffraction. Freeman, W.H., San Francisco.Google Scholar
Hank, V., and Macherauch, E., 1984, “A Useful Guide for X-Ray Stress Evaluation (XSE) Adv. X-Ray Analysis. 27: 81–99.Google Scholar
Light, T.B., and Wagner, C.N.J., 1966, “X-Ray Diffraction Study of Vacuum-Evaporated Silver Films”, J. Vac.Sci. Technol,. 3: 1–5.Google Scholar
Lim, G., Parrish, W., Ortiz, C., Bellotto, M., and Hart, M., 1987, “Grazing incidence synchrotron x-ray diffraction method for analyzing thin films”, J. Mater. Res. 2: 471– 477.Google Scholar
W.C., Marra, Eisenberger, P., and A.Y., Cho., 1979, “X-ray total-external-reflection-Bragg diffraction: A structural study of the GaAs-Al interface”, J. Appl. Phys. 50: 6927.Google Scholar
Parrish, W., and Mack, M., 1967, “Seemann-Bohlin Diffractometry. I. Instrumentation”, Acta Cryst. 23: 687–692.Google Scholar
Perry, A.J., and Chollet, L., 1986, “States of residual stress both in films and in their substrates”, J.Vac.Sci.Technol. A4: 2801-2808.Google Scholar
Raghuram, A.C., Nimmagadda, R., Bunshah, R.F., and Wagner, C.N.J., 1974, “Structure and Microhardness Relationships in Ti, Zr and Hf-3Zr Carbide Deposits Synthesized by Active Reactive Evaporation”, Thin Solid Films. 20: 187–199.Google Scholar
Wagner, C.N.J., 1966, “Analysis of the Broadening and Changes in Position of Peaks in an X-Ray Powder Pattern”, in Local Atomic Arrangements Studied by X-Ray Diffraction.Google Scholar
Cohen, J.B. and Hilliard, J.E., eds. Gordon and Breach, New York, Chapter 7, pp. 219– 269.Google Scholar
Warren, B.E., 1969, X-Ray Diffraction. Addison-Wesley, Reading, MA.Google Scholar