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K-band MEMS-based frequency adjustable waveguide filters for mobile back-hauling

Published online by Cambridge University Press:  04 April 2016

Luca Pelliccia ,
Paola Farinelli ,
Roberto Sorrentino ,
Giandomenico Cannone ,
Giulio Favre  and
Piero Coassini
Luca Pelliccia*
Affiliation:
RF Microtech, Via Mascagni, 11, Perugia, Italy
Paola Farinelli
Affiliation:
Department of Engineering, University of Perugia, Via G. Duranti, 93, Perugia, Italy. Phone: +39 075 52 71 436
Roberto Sorrentino
Affiliation:
Department of Engineering, University of Perugia, Via G. Duranti, 93, Perugia, Italy. Phone: +39 075 52 71 436
Giandomenico Cannone
Affiliation:
SIAE Microelettronica Spa, Via Michelangelo Buonarroti 21, Cologno Monzese (MI), Italy
Giulio Favre
Affiliation:
SIAE Microelettronica Spa, Via Michelangelo Buonarroti 21, Cologno Monzese (MI), Italy
Piero Coassini
Affiliation:
SIAE Microelettronica Spa, Via Michelangelo Buonarroti 21, Cologno Monzese (MI), Italy
*
Corresponding author:L. Pelliccia Email: pelliccia@rfmicrotech.com
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Abstract

This paper presents the first experimental results of a novel MEMS-based waveguide filter for mobile back-hauling at K-band with adjustable center frequency. The tuning concept employs commercial packaged RF MEMS switches, wire-bonded within a rectangular cavity. The switches are used to perturb the current distribution of the TE101 mode so as to tune the resonant frequency of the cavity. A tuning range up to 2% with unloaded Qs of the order of 1000 in K-band can be obtained. A second-order filter prototype employing commercially available MEMS on silicon substrate has been tested. Measurements show a 160 MHz frequency shift (0.7%) and Qs up to 1000 using only one MEMS per resonator. New higher-order prototypes using low-loss substrate MEMS (e.g. quartz) will be fabricated in order to get higher Qs. The concept here present leads to a very simple structure. The number of MEMS per resonator is, in fact, minimized (we use only one MEMS) and the design is simple. On the other hand, the achievable tuning range is lower (<2%) than the other concepts. Higher tuning ranges are achievable using more MEMS, but at the expense of lower Qs of the resonators.

Keywords

FiltersHigh-QRF-MEMSTunable filterWaveguide filter
Type
Research Papers
Information
International Journal of Microwave and Wireless Technologies , Volume 8 , Special Issue 4-5: EuMW 2015 Special Issue , June 2016 , pp. 751 - 757
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2016 

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References

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