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Control of stoichiometry, microstructure, and mechanical properties in SiC coatings produced by fluidized bed chemical vapor deposition

Published online by Cambridge University Press:  31 January 2011

E. López-Honorato ,
P.J. Meadows ,
J. Tan  and
P. Xiao
E. López-Honorato
Affiliation:
Materials Science Centre, School of Materials, The University of Manchester, Manchester M1 7HS, United Kingdom
P.J. Meadows
Affiliation:
Materials Science Centre, School of Materials, The University of Manchester, Manchester M1 7HS, United Kingdom
J. Tan
Affiliation:
Materials Science Centre, School of Materials, The University of Manchester, Manchester M1 7HS, United Kingdom
P. Xiao*
Affiliation:
Materials Science Centre, School of Materials, The University of Manchester, Manchester M1 7HS, United Kingdom
*
a)Address all correspondence to this author. e-mail: Ping.xiao@manchester.ac.uk
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Abstract

Stoichiometric silicon carbide coatings the same as those used in the formation of TRISO (TRistructural ISOtropic) fuel particles were produced by the decomposition of methyltrichlorosilane in hydrogen. Fluidized bed chemical vapor deposition at around 1500 °C, produced SiC with a Young’s modulus of 362 to 399 GPa. In this paper we demonstrate the deposition of stoichiometric silicon carbide coatings with refined microstructure (grain size between 0.4 and 0.8 μm) and enhanced mechanical properties (Young’s modulus of 448 GPa and hardness of 42 GPa) at 1300 °C by the addition of propene. The addition of ethyne, however, had little effect on the deposition of silicon carbide. The effect of deposition temperature and precursor concentration were correlated to changes in the type of molecules participating in the deposition mechanism.

Keywords

Chemical vapor deposition (CVD) (deposition)CoatingRaman spectroscopy
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 6 , June 2008 , pp. 1785 - 1796
Copyright
Copyright © Materials Research Society 2008

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