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Cross-sectional observation on the indentation of [001] silicon

Published online by Cambridge University Press:  31 January 2011

Y. Q. Wu ,
G. Y. Shi  and
Y. B. Xu
Y. Q. Wu
Affiliation:
State Key Laboratory for Fatigue and Fracture of Materials, Institute of Metal Research, The Chinese Academy of Sciences, Shenyang, 110015, People's Republic of China and Laboratory of Atomic Imaging of Solids, Institute of Metal Research, The Chinese Academy of Sciences, Shenyang, 110015, People's Republic of China
G. Y. Shi
Affiliation:
Department of Electronic Science and Engineering, University of Liaoning, Shenyang, 110036, People's Republic of China
Y. B. Xu
Affiliation:
State Key Laboratory for Fatigue and Fracture of Materials, Institute of Metal Research, The Chinese Academy of Sciences, Shenyang, 110015, People's Republic of China and Laboratory of Atomic Imaging of Solids, Institute of Metal Research, The Chinese Academy of Sciences, Shenyang, 110015, People's Republic of China
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Abstract

A transmission electron microscope (TEM) micrograph of cross-sectionally viewed Vickers indentation made on the surface of (001) silicon at ambient temperature was obtained. The picture clearly reveals a triangle area, pointing downward and having nondiffraction-contrast, left after unloading, which further confirms the amorphized range induced by indentation in silicon. Analysis of the picture directly manifests a significant recovery of indentation depth. Surface shape and range of the amorphous silicon region do not coincide with that of the indenter and the corresponding distribution pattern of hydrostatic stress beneath indentation predicted by elastoplastic theory, respectively. It seems that the amorphization could not be attributed to the result of hydrostatic stress alone.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 6 , June 1999 , pp. 2399 - 2401
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1.Gridneva, I.V., Milman, Yu. V., and Trefilov, V.I., Phys. Status Solidi (a) 14, 177 (1972).CrossRefGoogle Scholar
2.Gerk, A.P. and Tabor, D., Nature 271, 732 (1978).CrossRefGoogle Scholar
3.Clarke, D.R., Kroll, M. C., Kirchner, P.D., Cook, R. F., and Hockey, B. J., Phys. Rev. Lett. 60, 2156 (1988).CrossRefGoogle Scholar
4.Page, T.F., Oliver, W.C., and McHargue, C. J., J. Mater. Res. 7, 450 (1992).CrossRefGoogle Scholar
5.Callahan, D. L. and Morris, J. C., J. Mater. Res. 7, 1614 (1992).CrossRefGoogle Scholar
6.Susuki, T. and Ohmura, T., Philos. Mag. A 74, 1073 (1996).CrossRefGoogle Scholar
7.Lucazeau, G. and Abello, L., J. Mater. Res. 12, 2262 (1997).CrossRefGoogle Scholar
8.Gerberich, W.W., Nelson, J.C., Lilleodden, E. T., Anderson, P., and Wyrobek, J. T., Acta Mater. 44, 3585 (1996).CrossRefGoogle Scholar
9.Minowa, K. and Sumino, K., Phys. Rev. Lett. 69, 320 (1992).CrossRefGoogle Scholar
10.Johansson, S. and Schweitz, J-A., J. Am. Ceram. Soc. 71, 617 (1988).CrossRefGoogle Scholar
11.Saka, H. and Abe, S., J. Elect. Micros. 46, 45 (1997).CrossRefGoogle Scholar
12.Wu, Y.Q., Zhou, H.H., and Xu, Y.B., submitted to 14th International Congress on Electron Microscopy, Cancun, Mexico, Aug. 31–Sept. 4, 1998.Google Scholar
13.Callahan, D. L. and Morris, J. C., J. Mater. Res. 7, 1614 (1992).CrossRefGoogle Scholar
14.Lawn, B.R. and Swain, M.V., J. Mater. Sci. 10, 113 (1975).CrossRefGoogle Scholar
15.Giannakopoulos, A. E., Larsson, P-L., and Vestergaard, R., Int. J. Solids Struct. 31, 2679 (1994).CrossRefGoogle Scholar
16.Jamieson, J. C., Science 139, 762 (1963).CrossRefGoogle Scholar
17.Hu, J. Z., Merkle, L.D., Menoni, C.S., and Spain, I.L., Phys. Rev. B 34, 4679 (1986).CrossRefGoogle Scholar
18.Wu, Y.Q. and Xu, Y. B., J. Mater. Res. 3, 682 (1999).CrossRefGoogle Scholar