Hostname: page-component-5c6d5d7d68-wtssw Total loading time: 0 Render date: 2024-08-16T07:30:09.840Z Has data issue: false hasContentIssue false
  • English
  • Français

The dependence of structural and mechanical properties on film thickness in sol-gel zirconia films

Published online by Cambridge University Press:  31 January 2011

Melissa J. Paterson ,
Peter J. K. Paterson  and
Besim Ben-Nissan
Melissa J. Paterson
Affiliation:
School of Mathematics, Physics, Computing and Electronics, Macquarie University, Sydney, New South Wales 2109, Australia
Peter J. K. Paterson
Affiliation:
Department of Applied Physics, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria 3001, Australia
Besim Ben-Nissan
Affiliation:
Department of Materials Science, University of Technology, Sydney, P.O. Box 123, Broadway, New South Wales 2007, Australia
Get access

Extract

The structure, morphology, and mechanical properties of sol-gel zirconia films have been examined using XRD, AES depth profiling, AFM, and ultramicro indentation. There is a systematic variation in the structure and morphology of the zirconia films with increasing thickness. These changes include increases in the amount of monoclinic phase, substrate oxides, and a decrease in grain size. Ultramicro indentation measurements indicate measured hardness increases with film thickness. The highest hardness value was 6.12 GPa for a 900 nm thick film. However, these values may be influenced by the substrate oxide layer at the film/substrate interface which increases with film thickness. The modulus of the films appears to be thickness independent. As the films are made up of a number of separately fired layers, it appears that the property changes observed are also related to the number of thermal cycles experienced by the sample.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 2 , February 1998 , pp. 388 - 395
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Atik, M. and Aegerter, M.A., J. Non-Cryst. Solids 147&148, 813 (1992).CrossRefGoogle Scholar
2.Izumi, K., Murakami, M., Deguchi, T., Morrita, A.Toghe, N., and Minami, T., J. Am. Ceram. Soc. 72, 1465 (1989).Google Scholar
3.Sohn, Y.H., Biederman, R. R., and Sisson, R. D. Jr., Thin Solid Films 250, 1 (1994).Google Scholar
4.Ingo, G.M., J. Am. Ceram. Soc. 74, 381 (1991).Google Scholar
5.Ben-NissanÅ. Jamting, B. Å. Jamting, B., Ashcroft, I., and Swain, M.V., Inter-national Ceramic Monographs, Proceedings of the International Ceramics Conference, edited by Sorrell, C. C. and Ruys, A. J. (Australian Ceramic Society, 1994), Vol. 1, p. 637.Google Scholar
6.Anast, M., Ben-Nissan, B., Bartlett, J. R., Woolfrey, J. L., Bell, J.M., Bell, T. J., De Villiers, D.R., Spiccia, L., West, B.O., Johnston, G.R., and Watkins, I.D., Science and Technology of Zirconia V, edited by Badwal, S. P. S., Bannister, M. J., and Hannink, R.H.J. (Technomic Publishing Company Inc., Lancaster, PA, 1993), p. 259.Google Scholar
7.Maddalena, A. and Raccanelli, A., J. Non-Cryst. Solids 151, 115 (1992).Google Scholar
8.Swain, M.V. and Mencik, J., Thin Solid Films 253, 204 (1994).Google Scholar
9.Amouzouvi, K. F. and Clegg, L. J., Scripta Metall. et Mater. 30, 1139 (1994).Google Scholar
10.Debsikdar, J. C., J. Non-Cryst. Solids 87, 343 (1986).CrossRefGoogle Scholar
11.Pascual, R., Sayer, M., Yi, G., and Baker, C., J. Can. Ceram. Soc. 60, 43 (1991).Google Scholar
12.Field, J. S. and Swain, M.V., J. Mater Res. 8, 137 (1993).Google Scholar
13.Swain, M.V. and Weppelmann, E.R., in Thin Films: Stresses and Mechanical Properties IV, edited by Townsend, P.H., Weihs, T. P., Sanchez, J. E. Jr., and Børgesen, P. (Mater. Res. Soc. Symp. Proc. 308, Pittsburgh, PA, 1993), p. 177.Google Scholar