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Determination of optical constants of Si/ZnO polycrystalline nanocomposites by spectroscopic ellipsometry

Published online by Cambridge University Press:  31 January 2011

J. García-Serrano ,
N. Koshizaki ,
T. Sasaki ,
G. Martínez-Montes  and
U. Pal
J. García-Serrano
Affiliation:
Centro de Investigaciones en Materiales y Metalurgia (CIMyM), Universidad Autónoma del Estado de Hidalgo, Carretera Pachuca-Tulancingo Km. 4.5, Pachuca, Hgo. 42074, México
N. Koshizaki
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nanoarchitectonics Research Center, Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305–8565, Japan
T. Sasaki
Affiliation:
National Institute of Advanced Industrial Science and Technology, Nanoarchitectonics Research Center, Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305–8565, Japan
G. Martínez-Montes
Affiliation:
Instituto de Física, Universidad Autónoma de Puebla, Apdo. Postal J-48, Puebla, Pue. 72570, México
U. Pal*
Affiliation:
Instituto de Física, Universidad Autónoma de Puebla, Apdo. Postal J-48, Puebla, Pue. 72570, México
*
a)Address all correspondence to this author. e-mail: upal@sirio.ifuap.buap.mx
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Abstract

The optical constants of Si/ZnO composite films grown on quartz glass substrates were determined in the spectral range 1.5–5.0 eV by spectroscopic ellipsometry using a rotating-analyzer ellipsometer. The structure of the samples was modeled by a two-phase (substrate–film) model, and the optical functions of the film were parameterized through different effective medium approximations. The results allowed us to estimate the microstructural film parameters, such as film thickness, the volume fractions of each of the constituents, and optical constants.

Type
Articles
Information
Journal of Materials Research , Volume 16 , Issue 12 , December 2001 , pp. 3554 - 3559
Copyright
Copyright © Materials Research Society 2001

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References

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