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Energy losses of ions implanted in matter

Published online by Cambridge University Press:  31 January 2011

J. H. Liang  and
K. Y. Liao
J. H. Liang
Affiliation:
Department of Nuclear Engineering and Engineering Physics, National Tsing Hua University, Hsinchu, Taiwan 30043, Republic of China
K. Y. Liao
Affiliation:
Department of Nuclear Engineering and Engineering Physics, National Tsing Hua University, Hsinchu, Taiwan 30043, Republic of China
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Abstract

A set of simple and accurate formulae for the first four moments of nuclear and electronic energy losses is proposed. A new variable is introduced to include the finite maximum-impact-parameter effect in the nuclear stopping process, which is assumed to be infinite in most studies. A critical energy at which the electronic energy loss is equal to the nuclear energy loss is also defined. It determines whether the nuclear or the electronic stopping process is the dominant mechanism in terms of incident-ion energy. The critical energy increases for heavy ions implanted in heavy target materials during the first moment of energy loss. The second moment of electronic energy loss is important only for light ions implanted at high ion energies. The third and fourth moments of nuclear energy loss are much larger than those of the electronic energy loss for all ion-target combinations. Theoretical predications of the projected ranges and range stragglings for gold ions implanted in carbon films are close to the experimental data when these proposed four moments of nuclear and electronic energy losses are considered.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 11 , November 1996 , pp. 2876 - 2883
Copyright
Copyright © Materials Research Society 1996

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