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Fabrication of ordered Ta2O5 nanodots using an anodic aluminum oxide template on Si substrate

Published online by Cambridge University Press:  03 March 2011

Ching-Jung Yang ,
Chih Chen ,
Pu-Wei Wu ,
Jia-Min Shieh ,
Shun-Min Wang  and
Shih-Wei Liang
Ching-Jung Yang
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
Chih Chen*
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
Pu-Wei Wu
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
Jia-Min Shieh
Affiliation:
National Nano Device Laboratories, Hsinchu 30078, Taiwan, Republic of China
Shun-Min Wang
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
Shih-Wei Liang
Affiliation:
Department of Material Science and Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan, Republic of China
*
a) Address all correspondence to this author. e-mail: chih@cc.nctu.edu.tw
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Abstract

Ordered arrays of Ta2O5 nanodots were prepared using anodic aluminum oxide (AAO) as a template to support localized oxidation of TaN. Films of TaN (50 nm) and Al (1.5 μm) were deposited successively on p-type Si wafers and followed by a two-step anodization process at 40 V using oxalic acid as the electrolyte. The first anodization promoted growth of irregular AAO from overlying Al film. After chemical etching, the second anodization was performed to develop well-organized AAO channels and initiate oxidation of underlying TaN film to form tantalum oxide nanodots at the AAO pore bottoms. X-ray photoelectron spectroscopy results confirmed the chemical nature of nanodots as stoichmetric Ta2O5. X-ray diffraction demonstrated the amorphous characteristic of Ta2O5. As shown in field-emission scanning electron microscopy and transmission electron results, the Ta2O5 nanodots exhibited a hillock structure 80 nm in diameter at the bottom and 50 nm in height. We also synthesized 30-nm nanodots by adjusting AAO formation electrochemistry. This demonstrates the general applicability of the AAO template method for nanodot synthesis from nitride to oxide at a desirable size.

Keywords

NanoscaleNanostructure
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 4 , April 2007 , pp. 1064 - 1071
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1Jeong, S-H., Hwang, H-Y., Lee, K-H., and Jeong, Y.: Template-based carbon nanotubes and their application to a field emitter. Appl. Phys. Lett. 78, 2052 (2001).CrossRefGoogle Scholar
2Chen, P-L., Huang, W-J., Chang, J-K., Kuo, C-T., and Pan, F-M.: Fabrication and field emission characteristics of highly ordered titanium oxide nanodot arrays. electrochem. Solid-State Lett. 8, H83 (2005).CrossRefGoogle Scholar
3Chen, P-L., Kuo, C-T., Pan, F-M., and Tsai, T-G.: Preparation and phase transformation of highly ordered TiO2 nanodot arrays on sapphire substrates. Appl. Phys. Lett. 84, 3888 (2004).CrossRefGoogle Scholar
4Tien, L.C., Sadik, P.W., Norton, D.P., Voss, L.F., Pearton, S.J., Wang, H.T., Kang, B.S., Ren, F., Jun, J., and Lin, J.: Hydrogen sensing at room temperature with Pt-coated ZnO thin films and nanorods. Appl. Phys. Lett. 87, 2221061 (2005).CrossRefGoogle Scholar
5Jin, G., Liu, J.L., Thomas, S.G., Luo, Y.H., Wang, K.L., and Nguyen, B-Y.: Controlled arrangement of self-organized Ge islands on patterned Si (001) substrates. Appl. Phys. Lett. 75, 2752 (1999).CrossRefGoogle Scholar
6Kitajima, T., Liu, B., and Leone, S.R.: Two-dimensional periodic alignment of self-assembled Ge islands on patterned Si(001) . . . surfaces. Appl. Phys. Lett. 80, 497 (2002).CrossRefGoogle Scholar
7Mei, X., Kim, D., Ruda, H.E., and Guo, Q.X.: Molecular-beam epitaxial growth of GaAs and InGaAs/GaAs nanodot arrays using anodic Al2O3 nanohole array template masks. Appl. Phys. Lett. 81, 361 (2002).CrossRefGoogle Scholar
8Masuda, H., Yasui, K., and Nishio, K.: Fabrication of ordered arrays of multiple nanodots using anodic porous alumina as an evaporation mask. Adv. Mater. 12, 1031 (2000).3.0.CO;2-R>CrossRefGoogle Scholar
9Li, A.P., Müller, F., Birner, A., Nielsch, K., and Gösele, U.: Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic alumina. J. Appl. Phys. 84, 6023 (1998).CrossRefGoogle Scholar
10Liang, J., Chik, H., Yin, A., and Xu, J.: Two-dimensional lateral superlattices of nanostructures: Nonlithographic formation by anodic membrane template. J. Appl. Phys. 91, 2544 (2002).CrossRefGoogle Scholar
11Crouse, D., Lo, Y-H., Miller, A.E., and Crouse, M.: Self-ordered pore structure of anodized aluminum on silicon and pattern transfer. Appl. Phys. Lett. 76, 49 (2000).CrossRefGoogle Scholar
12Shingubara, S., Okino, O., Murakami, Y., Sakaue, H., and Takahagi, T.: Fabrication of nanohole array on Si using self-organized porous alumina mask. J. Vac. Sci. Technol. B 19, 1901 (2001).CrossRefGoogle Scholar
13Iwasaki, T., Motoi, T., and Den, T.: Multiwalled carbon nanotubes growth in anodic alumina nanoholes. Appl. Phys. Lett. 75, 2044 (1999).CrossRefGoogle Scholar
14Hu, W., Gong, D., Chen, Z., Yuan, L., Saito, K., Grimes, C.A., and Kichambare, P.: Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate. Appl. Phys. Lett. 79, 3083 (2001).CrossRefGoogle Scholar
15Chu, S.Z., Wada, K., Inoue, S., and Todoroki, S.: Formation and microstructures of anodic alumina films from aluminum sputtered on glass substrate. J. Electrochem. Soc. 149, B321 (2002).CrossRefGoogle Scholar
16Mozalev, A., Surganov, A., and Magaino, S.: Anodic process for forming nanostructured metal-oxide coatings for large-value precise microfilm resistor fabrication. Electrochim. Acta 44, 3891 (1999).CrossRefGoogle Scholar
17Vorobyova, A.I., Sokol, V.A., and Outkina, E.A.: SEM investigation of pillared microstructures formed by electrochemical anodization. Appl. Phys. A: Mater. Sci. Proc. 67, 487 (1998).CrossRefGoogle Scholar
18Perriere, J., Rigo, S., and Siejka, J.: Investigation of cation-transport processes during anodic oxidation of duplex layers of tantalum on niobium by the use of rutherford backscattering and nuclear microanalysis. J. Electrochem. Soc. 125, 1549 (1978).CrossRefGoogle Scholar
19Perriere, J. and Siejka, J.: Study of the anodization of niobium and tantalum superimposed layers by 18O tracing techniques and nuclear microanalysis. J. Electrochem. Soc. 130, 1267 (1980).CrossRefGoogle Scholar
20Mozalev, A., Sakairi, M., Saeki, I., and Takahashi, H.: Structure, morphology, and dielectric properties of nanocomposite oxide films formed by anodizing of sputter-deposited Ta–Al bilayers. J. Electrochem. Soc. 151, F257 (2004).CrossRefGoogle Scholar
21Mozalev, A., Sakairi, M., Saeki, I., and Takahashi, H.: Nucleation and growth of the nanostructured anodic oxides on tantalum and niobium under the porous alumina film. Electrochim. Acta 48, 3155 (2003).CrossRefGoogle Scholar
22Chu, S.Z., Inoue, S., Wada, K., Hishita, S., and Kurashima, K.: A new electrochemical lithography-fabrication of self-organized titania nanostructures on glass by combined anodization. J. Electrochem. Soc. 152, B116 (2005).CrossRefGoogle Scholar
23Chu, S-Z., Inoue, S., Wada, K., Hishita, S., and Kurashima, K.: Self-organized nanoporous anodic titania films and ordered titania nanodots/nanorods on glass. Adv. Funct. Mater. 15, 1343 (2005).CrossRefGoogle Scholar
24Chen, P-L., Kuo, C-T., Tsai, T-G., Wu, B-W., Hsu, C-C., and Pan, F-M.: Self-organized titanium oxide nanodot arrays by electrochemical anodization. Appl. Phys. Lett. 82, 2796 (2003).CrossRefGoogle Scholar
25Masuda, H. and Fukuda, K.: Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268, 1466 (1995).CrossRefGoogle ScholarPubMed
26Vorobyova, A.I. and Outkina, E.A.: Study of pillar microstructure formation with anodic oxides. Thin Solid Films 324, 1 (1998).CrossRefGoogle Scholar
27Moulder, J.F., Stickle, W.F., Sobol, P.E., Bomben, K.D., and Chastain, J.: Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Eden Prairie, MN, 1992).Google Scholar
28Masuda, Y., Wakamatsu, S., and Koumoto, K.: Site-selective deposition and micropatterning of tantalum oxide thin films using a monolayer. J. Eur. Ceram. Soc. 24, 301 (2004).CrossRefGoogle Scholar
29Takahashi, H. and Nagayama, M.: The determination of the porosity of anodic oxide films on aluminium by the pore-filling method. Corros. Sci. 18, 911 (1978).CrossRefGoogle Scholar
30Lu, Q., Skeldon, P., Thompson, G.E., Masheder, D., Habazaki, H., and Shimizu, K.: Transport numbers of metal and oxygen species in anodic tantala. Corros. Sci. 46, 2817 (2004).CrossRefGoogle Scholar
31Pringle, J.P.S.: The anodic oxidation of superimposed metallic layers: Theory. Electrochim. Acta. 25, 1423 (1980).CrossRefGoogle Scholar