Hostname: page-component-77c89778f8-m8s7h Total loading time: 0 Render date: 2024-07-20T22:35:48.171Z Has data issue: false hasContentIssue false
  • English
  • Français

Formation of silica coating films from spin-on polysilazane at room temperature and their stability in hot water

Published online by Cambridge University Press:  03 March 2011

Tomoko Kubo ,
Eisuke Tadaoka  and
Hiromitsu Kozuka
Tomoko Kubo
Affiliation:
Department of Materials Science and Engineering, Kansai University, 3-3-35 Yamate-cho, Suita, 564-8680, Japan
Eisuke Tadaoka
Affiliation:
Research & Development Department, Hitachi Housetec Co., Ltd., 1250 Shimoezure, Shimodate-shi, Ibaraki 308-8523, Japan
Hiromitsu Kozuka
Affiliation:
Department of Materials Science and Engineering, Kansai University, 3-3-35 Yamate-cho, Suita, 564-8680, Japan
Get access

Abstract

Spin-coating was conducted on single-crystal silicon substrates using a xylene solution of perhydropolysilazane (PHPS) to obtain 0.14-μm-thick PHPS films. The PHPS films obtained were suspended over various acidic and basic solutions at room temperature so that they were exposed to the vapors from the solutions. PHPS-to-silica film conversion was studied by infrared absorption spectroscopy, and the stability of the exposed films in hot water was examined by soaking the films in 80 °C water. The as-deposited PHPS films were found to be dissolved in water. When the PHPS films were suspended over water, the films were partially converted into silica, but the resultant film had low stability in hot water. Higher degrees of PHPS-to-silica conversion and higher stabilities in hot water were found on exposing the PHPS films to basic or acidic vapors. Exposure to highly basic vapors from aqueous solutions of ammonia and ethylamine was significantly effective in PHPS-to-silica film conversion, which provided silica thin films with high stability in hot water.

Keywords

Solution depositionThin filmInfrared (IR) spectroscopy
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 2 , February 2004 , pp. 635 - 642
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Yang, S., Mirau, P.T., Pai, C., Nalamasu, O., Reichmanis, E., Lin, E.K., Lee, H., Gidley, D.W. and Sun, J., Chem. Mater. 13 2762 (2001).CrossRefGoogle Scholar
2De Sanctis, O., Gomez, L., Pellegri, N., Parodi, C., Marajofsky, A. and Duran, A., J. Non-Cryst. Solids 121 338 (1990).CrossRefGoogle Scholar
3Brow, R.K. and Pantano, C.G. in Better Ceramics Through Chemistry, edited by Brinker, C.J., Clark, D.E., and Ulrich, D.R. (Mater. Res. Soc. Symp. Proc. 32, Pittsburgh, PA, 1984), pp. 361–367.Google Scholar
4Makita, K., New Ceramics 9 33 1996 [in Japanese].Google Scholar
5Kintaka, K., Nishii, J., Mizutani, A., Kikuta, H. and Nakano, H., Opt. Lett. 26 1642 (2001).CrossRefGoogle Scholar
6Roccaforte, F., Dhar, S., Harbsmeier, F. and Lieb, K.P., Appl. Phys. Lett. 75 2903 (1999).CrossRefGoogle Scholar
7Song, Y., Sakurai, T., Maruta, K., Matsushita, A., Matsumoto, S., Saisho, S. and Kikuchi, K., Vacuum 59 755 (2000).CrossRefGoogle Scholar
8Shirai, M., Umeda, S., Tsunooka, M. and Matsuo, T., Eur. Polym. J. 34 1295 (1998).CrossRefGoogle Scholar
9Sakka, S.Science of Sol Gel Method (Agune-Shofu-Sha, Toyko, 1988), Chap. 6 [in Japanese].Google Scholar
10Oh, J., Imai, H. and Hirashima, H., Chem. Mater. 10 1582 (1998).CrossRefGoogle Scholar
11Mitchell, P.J. and Wilcox, G.D., Nature 357 395 (1992).CrossRefGoogle Scholar
12Sugama, T. and Carciello, N., Mater. Lett. 14 322 (1992).CrossRefGoogle Scholar
13Matsuo, H. and Yamada, K., Convertech 23 25 (1995).Google Scholar
14Kamiya, K., Tange, T., Hashimoto, T., Nasu, H. and Shimizu, Y., Research Reports of the Faculty of Engineering, Mie Univ. 26 23 (2001).Google Scholar
15Riter, E. in Physics of Thin Films, edited by Hass, G., Francombe, M.H., and Hoffmann, R.W. (Academic Press, New York, 1975), Vol. 8, pp. 1–45.Google Scholar
16Gros, Y., Jousse, D., Liu, J. and Rostaing, J.C., J. Non-Cryst. Solids 90 287 (1987).Google Scholar
17Lucovsky, G. and Tsu, D.V., J. Non-Cryst. Solids 90 259 (1987).CrossRefGoogle Scholar
18Parrill, T.M., J. Mater. Res. 7 2230 (1992).CrossRefGoogle Scholar
19Sporleder, D. and Ewing, G.E., J. Phys. Chem. A 105 1838 (2001).CrossRefGoogle Scholar
20Colthup, N.B., Daly, L.H. and Wiberley, S.E.Introduction to Infrared and Raman Spectroscopy (Academic Press, San Diego, 1990).Google Scholar
21Keefer, K.D.Better Ceramics Through Chemistry, edited by Brinker, C.J., Clark, D.E., and Ulrich, D.R. (Mater. Res. Soc. Symp. Proc. 32, Pittsburgh, PA, 1984), pp. 15–24.Google Scholar