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Fracture surface analysis of free-standing diamond films

Published online by Cambridge University Press:  03 March 2011

L.P. Hehn ,
Z. Chen ,
J.J. Mecholsky Jr. ,
P. Klocek ,
J.T. Hoggins  and
J.M. Trombetta
L.P. Hehn
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
Z. Chen
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
J.J. Mecholsky Jr.
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, Florida 32611
P. Klocek
Affiliation:
Texas Instruments, Dallas, Texas 75265
J.T. Hoggins
Affiliation:
Texas Instruments, Dallas, Texas 75265
J.M. Trombetta
Affiliation:
Texas Instruments, Dallas, Texas 75265
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Abstract

Free-standing CVD diamond disk-shaped films of varying thicknesses between ∼40 and 1000 μm were fractured in ball-on-ring flexure using a high-precision hydraulic testing machine. Some of the films were smooth on the side formerly in contact with the substrate and rough (large crystallites) on the reverse side and some of the films were polished. Raman spectroscopic examination showed some of the films to be of high quality and others to be of lower quality (higher levels of non-diamond carbon mixed with diamond phase). All fracture surfaces were examined to identify the origin of failure. Strength varied between 650 and 971 MPa, and the fracture toughness was determined from fracture surface analysis to average 8 ± 1 MPam1/2.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 6 , June 1994 , pp. 1540 - 1545
Copyright
Copyright © Materials Research Society 1994

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References

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