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Growth defects in diamond films

Published online by Cambridge University Press:  31 January 2011

D. Shechtman
Affiliation:
Department of Materials Engineering, Technion, Haifa, Israel
J.L. Hutchison
Affiliation:
University of Oxford, Oxford, United Kingdom
L.H. Robins
Affiliation:
National Institute of Standards and Technology,b) Gaithersburg, Maryland 20899
E.N. Farabaugh
Affiliation:
National Institute of Standards and Technology,b) Gaithersburg, Maryland 20899
A. Feldman
Affiliation:
National Institute of Standards and Technology,b) Gaithersburg, Maryland 20899
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Abstract

Growth defects in diamond films grown by plasma-assisted chemical vapor deposition (CVD) were studied by high resolution electron microscopy. Several features of the microstructure were resolved and their importance to the growth of the diamond film was evaluated. The observations included various twin boundaries of the type ∑ = 3, as well as ∑ = 9, ∑ = 27, and ∑ = 81, which form by an interaction of lower order twins. These higher order boundaries are loci of intersection points of growing planes on two adjacent twins and can serve as an indicator for the local crystal growth direction. The central nucleation site for the growing planes in many cases can be traced back to a quintuplet twin point. A twin quintuplet has five re-entrant angles and thus serves as a preferred nucleation site for new planes as the crystal grows.

Type
Articles
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1Williams, B. E. and Glass, J.T., J. Mater. Res. 4, 373 (1989).CrossRefGoogle Scholar
2Narayan, J., J. Mater. Res. 5, 2414 (1990).CrossRefGoogle Scholar
3Williams, B.E., Glass, J.T., Davis, R.F., Kobashi, K., and More, K.L., in Proceedings of the First International Symposium on Diamond and Diamond-Like Films, edited by Dismukes, J. P., Purdes, A. J., Meyerson, B. S., Moustakas, T. D., Spear, K. E., Ravi, K. V., and Yoder, M. (The Electrochemical Society, Inc., Pennington, NJ, 1989), p. 202.Google Scholar
4Ma, G. H. M., Lee, Y. H., and Glass, J. T., J. Mater Res. 5, 2367 (1990).CrossRefGoogle Scholar
5Narayan, J., Srivatsa, A. R., Peters, M., Yokota, S., and Ravi, K. V., Appl. Phys. Lett. 53, 1823 (1988).CrossRefGoogle Scholar
6Williams, B. E., Kong, H. S., and Glass, J. T., J. Mater. Res. 5, 801 (1990).Google Scholar
7Kobashi, K., Nishimura, K., Miyata, K., Kawate, Y., Glass, J. T., and Williams, B. E., in Diamond Optics, edited by Feldman, Albert and Holly, Sandor, Proc. SPIE 969 (SPIE, Bellingham, WA, 1989), p. 159.CrossRefGoogle Scholar
8Shechtman, D., Farabaugh, E. N., Robins, L. H., and Hutchison, J. L., in Diamond Optics IV, edited by Feldman, Albert and Holly, Sandor, Proc. SPIE 1534 (SPIE, Bellingham, WA, 1991), p. 26.Google Scholar
9Ranganathan, S., Acta Crystallogr. 21, 197 (1966).CrossRefGoogle Scholar
10Vaudin, M. D., Cunningham, B., and Ast, D. G., Scripta Metall. 17, 191 (1983).CrossRefGoogle Scholar
11Iijima, S., Jpn. J. Appl. Phys. 26, 357 (1987).Google Scholar
12Iijima, S., Jpn. J. Appl. Phys. 26, 365 (1987).Google Scholar
13Dahmen, U., Hetherington, C.J., Pirouz, P., and Westmacott, K. H., Scripta Metall. 23, 269 (1989).CrossRefGoogle Scholar
14Zhu, W., Badzian, A.R., and Messier, R., J. Mater. Res. 4, 659 (1989).CrossRefGoogle Scholar
15Hirsch, P. B., Howie, A., Nicholson, R. B., Pashley, D. W., and Whelan, M. J., Electron Microscopy of Thin Crystals (Butterworths, London, 1967).Google Scholar
16Wagner, R. S., Acta Metall. 8, 57 (1958).Google Scholar
17Bennett, A.I. and Longini, R.L., Phys. Rev. 116, 53 (1959).Google Scholar
18Hamilton, D.R. and Seidensticker, R. G., J. Appl. Phys. 31, 1165 (1960).Google Scholar
19Hamilton, D.R. and Seidensticker, R.G., J. Appl. Phys. 34, 1450 (1963).Google Scholar
20Seidensticker, R.G. and Hamilton, D.R., J. Appl. Phys. 34, 3113 (1963).CrossRefGoogle Scholar
21Abe, T., J. Cryst. Growth 24/25, 463 (1974).CrossRefGoogle Scholar
22Price, P.B., Philos. Mag. 4, 1229 (1960).Google Scholar
23Lang, A. R., J. Cryst. Growth 24/25, 108 (1974).CrossRefGoogle Scholar
24Matsumoto, S. and Matsui, Y., J. Mater. Sci. 18, 1785 (1983).CrossRefGoogle Scholar