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Hydride precipitation in vapor deposited Ti thin films

Published online by Cambridge University Press:  31 January 2011

S.R. Peddada ,
I.M. Robertson  and
H.K. Birnbaum
S.R. Peddada
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana–Champaign, Urbana, Illinois 61801
I.M. Robertson
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana–Champaign, Urbana, Illinois 61801
H.K. Birnbaum
Affiliation:
Department of Materials Science and Engineering and Materials Research Laboratory, University of Illinois at Urbana–Champaign, Urbana, Illinois 61801
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Abstract

Titanium hydrides having two different crystal structures were observed in α–Ti thin films grown epitaxially on sapphire substrates by e-beam physical vapor deposition. One of the hydrides (γ-hydride) had a face-centered tetragonal structure (c/a > 1) with an ordered arrangement of hydrogen atoms. The second hydride formed was the fcc δ-hydride. The γ-hydride grew as platelets in the α–Ti lattice with {10$\overline 1$0}Ti habit planes, whereas the γ-hydrides formed directly on the sapphire substrate parallel to the (0001)Ti. These hydrides are one of the principal causes of film decohesion.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 2 , February 1993 , pp. 291 - 296
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1Peddada, S. R.Robertson, I. M. and Birnbaum, H. K. unpublished research.Google Scholar
2Numakura, H. and Koiwa, M.Acta Metall. 32, 1799 (1984).Google Scholar
3Woo, O.T.Weatherly, G.C.Coleman, C.E. and Gilbert, R.W.Acta Metall. 33, 1897 (1985).CrossRefGoogle Scholar
4Numakura, H.Koiwa, M.Asano, H.Murata, H. and Izumi, F.Scripta Metall. 20, 213 (1986).Google Scholar
5Paton, N.E. and Spurting, R.A.Metall. Trans. 7A, 1769 (1976).Google Scholar
6Boyd, J. D.Trans. Am. Soc. Met. 62, 977 (1969).Google Scholar
7Hall, I.W.Metall. Trans. 9A, 815 (1978).Google Scholar
8Hall, I. W.Scand. J. Metall. 7, 277 (1978).Google Scholar
9Hall, I.W. and Hammond, C.Metal Sci. 12, 339 (1978).CrossRefGoogle Scholar
10Hammond, C.Spurting, R. A. and Paton, N. E.Metall. Trans. 15A, 813 (1984).Google Scholar
11Peddada, S.R. Ph.D. Thesis, University of Illinois at Urbana-Champaign (1991).Google Scholar
12Shih, D.S. and Birnbaum, H.K.Scripta Metall. 20, 1261 (1986).CrossRefGoogle Scholar
13Yakel, H.L. Jr. , Acta Crystallogr. 11, 46 (1958).CrossRefGoogle Scholar