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Indium tin oxide thin films prepared by thermal decomposition of ethylene glycol solution

Published online by Cambridge University Press:  31 January 2011

Osamu Yamamoto ,
Tadashi Sasamoto  and
Michio Inagaki
Osamu Yamamoto
Affiliation:
Department of Chemical Technology, Kanagawa Institute of Technology, 1030 Shimo-ogino, Atsugi-shi, 243-02 Japan
Tadashi Sasamoto
Affiliation:
Department of Chemical Technology, Kanagawa Institute of Technology, 1030 Shimo-ogino, Atsugi-shi, 243-02 Japan
Michio Inagaki
Affiliation:
Department of Applied Chemistry, Faculty of Engineering, Hokkaido University, Kita-Ku, Sapporo, 060 Japan
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Abstract

Indium tin oxide (ITO) films were prepared on a glass substrate by thermal decomposition of ethylene glycol (EG) solutions which were prepared by dissolving indium and tin chlorides into ethylene glycol and then heating the solution at 200 °C. Homogeneous ITO film with a thickness of 1 μm without any cracks was obtained from the EG solution with a viscosity of about 50 cSt by spin coating, with the rotation of the substrate at 2000 rpm. The crystallization of the film thus obtained occurred above 400 °C. A well-crystallized ITO film was obtained by heat-treating at 600 °C. The resistivity of the ITO film obtained on a glass substrate showed a minimum value of 1.1 × 10−4 ohm cm at about 7 at.% Sn.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 9 , September 1992 , pp. 2488 - 2491
Copyright
Copyright © Materials Research Society 1992

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