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Ion beam etching of polytetrafluoroethylene

Published online by Cambridge University Press:  31 January 2011

L. Torrisi  and
G. Foti
L. Torrisi
Affiliation:
Dipartimento di Fisica di Catania, Corso Italia, 57–95129 Catania, Italy
G. Foti
Affiliation:
Dipartimento di Fisica di Catania, Corso Italia, 57–95129 Catania, Italy
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Abstract

Cross-links among long chains have been observed in ion bombarded hydrocarbon polymers like polystyrene or polyethylene. Irradiation of fluoropolymers, instead, produces a strong sample erosion with emission of fragments produced along the ion track. Polytetrafluoroethylene foils of thickness ranging from 50 μm up to 2 mm were exposed to MeV helium and proton beams. The ion erosion rate was investigated by changing the target temperature and observing surface topography modifications, using the scanning electron microscopy technique. Etching was measured as removed thickness per irradiation time in the range values of 102−104 μm/h, corresponding to about 104−106 CF2 emitted group/ion. Target temperature (200–400 K), ion mass, and ion energy are the key parameters to follow the evolution of ion erosion of polytetrafluoroethylene.

Type
Articles
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2723 - 2728
Copyright
Copyright © Materials Research Society 1990

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References

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