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Microstructural evolution of dense and porous pyroelectric Pb1−xCaxTiO3 thin films

Published online by Cambridge University Press:  31 January 2011

Andreas Seifert ,
Laurent Sagalowicz ,
Paul Muralt  and
Nava Setter
Andreas Seifert
Affiliation:
Laboratoire de Céramique, Département des Matériaux, Ecole Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland
Laurent Sagalowicz
Affiliation:
Laboratoire de Céramique, Département des Matériaux, Ecole Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland
Paul Muralt
Affiliation:
Laboratoire de Céramique, Département des Matériaux, Ecole Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland
Nava Setter
Affiliation:
Laboratoire de Céramique, Département des Matériaux, Ecole Polytechnique Fédérale de Lausanne, 1015 Lausanne, Switzerland
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Abstract

Pb1−xCaxTiO3 thin films with x = 0−0.3 for pyroelectric applications were deposited on platinized silicon wafers by chemical solution processing. Ca-substitution for Pb in PbTiO3 results in a reduced c/a ratio of the unit cell, which, in turn, leads to better pyroelectric properties. Control of nucleation and growth during rapid thermal annealing to 650 °C allowed the formation of either highly porous or dense (111) oriented films. The inclusion of pores creates a matrix-void composite with the low permittivity desired for pyroelectric applications, resulting in a high figure of merit. The growth mechanisms for the microstructural evolution of both dense and porous films were analyzed by x-ray diffraction, transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectrometry and allowed establishment of microstructure/property relationships.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 5 , May 1999 , pp. 2012 - 2022
Copyright
Copyright © Materials Research Society 1999

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