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Nanoindentation of a 10 nm thick thin film

Published online by Cambridge University Press:  31 January 2011

Takeshi Sawa ,
Yasushi Akiyama ,
Atsushi Shimamoto  and
Kohichi Tanaka
Takeshi Sawa
Affiliation:
Department of Mechanical Engineering, Nagaoka University of Technology, 1603–1 Kamitomioka, Nagaoka, Niigata, 940–2188, Japan
Yasushi Akiyama
Affiliation:
Department of Mechanical Engineering, Nagaoka University of Technology, 1603–1 Kamitomioka, Nagaoka, Niigata, 940–2188, Japan
Atsushi Shimamoto
Affiliation:
Department of Mechanical Engineering, Nagaoka University of Technology, 1603–1 Kamitomioka, Nagaoka, Niigata, 940–2188, Japan
Kohichi Tanaka*
Affiliation:
Department of Mechanical Engineering, Nagaoka University of Technology, 1603–1 Kamitomioka, Nagaoka, Niigata, 940–2188, Japan
*
c)Address all correspondence to this author. e-mail: tanaka@mech.nagaokaut.ac.jp
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Abstract

In a nanometer order nanoindentation test, roundness or truncation of the indenter tip cannot be avoided. In this paper, we have analyzed the indentation problem of a rounded triangular indentation into a layered elastic half-space by a finite element analysis and then established a method to estimate the intrinsic elastic modulus of the film from the nanoindentation data. The method was applied to analyze the nanoindentation data of a less-than-10 nm penetration depth on a 10 nm thick diamondlike carbon film deposited on a 50 nm thick magnetic layer.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 6 , June 1999 , pp. 2228 - 2232
Copyright
Copyright © Materials Research Society 1999

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References

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