Hostname: page-component-7bb8b95d7b-2h6rp Total loading time: 0 Render date: 2024-09-18T12:21:36.902Z Has data issue: false hasContentIssue false

Properties of laser fabricated nanostructured Cu/diamond-like carbon composite

Published online by Cambridge University Press:  17 October 2011

Y.M. Foong
Affiliation:
Department of Materials Science & Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore
A.T.T. Koh
Affiliation:
Department of Materials Science & Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore
S.R. Lim
Affiliation:
Department of Materials Science & Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore
D.H.C. Chua*
Affiliation:
Department of Materials Science & Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore
H.Y. Ng
Affiliation:
Department of Civil & Environmental Engineering, Faculty of Engineering, National University of Singapore, Singapore 117576, Singapore
*
a)Address all correspondence to this author. e-mail: msechcd@nus.edu.sg
Get access

Abstract

Copper/diamond-like carbon (DLC) was fabricated using pulsed laser deposition, and the effects of copper on the properties of DLC composites were studied. Experimental results showed that the presence of copper promoted surface evolution through the formation of nanoclusters, accentuated the formation of Si–C but graphitized the diamond bondings of DLC matrix. By considering the interaction of laser with copper/carbon composite target, the presence of copper may have increased the energy absorbed during laser deposition, as envisaged by Saha’s equation. Thus, upon the impingement of ions on substrate during deposition, the carbon and silicon atoms may have been redistributed to form Si–C bonding while the excess energy was released as heat to promote the formation of nanoclusters but graphitize the sp3 bonding in DLC. Although sp3 bonding was reduced with the presence of copper, mechanical characterization showed that the adhesion strength of the composite films was approximately five times higher compared to undoped DLC, as a result of the decrease in internal stress and the formation of Si–C bondings in DLC.

Type
Articles
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Robertson, J.: Diamond-like amorphous carbon. Mater. Sci. Eng., R 37, 129 (2002).Google Scholar
2.Kim, S.H., Asay, D.B., and Dugger, M.T.: Nanotribology and MEMS. Nano Today 2, 22 (2007).Google Scholar
3.Bhushan, B. and Dandavate, C.: Thin-film friction and adhesion studies using atomic force microscopy. J. Appl. Phys. 87, 1201 (2000).Google Scholar
4.Sheeja, D., Tay, B.K., Yu, L., and Lau, S.P.: Low stress thick diamond-like carbon films prepared by filtered arc deposition for tribological applications. Surf. Coat. Technol. 154, 289 (2002).CrossRefGoogle Scholar
5.Gabriel, K.J., Behi, F., and Mahadevan, R.: In situ friction and wear measurements in integrated polysilicon mechanisms. Sens. Actuators, A 21, 184 (1990).Google Scholar
6.Mehregany, M., Gabriel, K.J., and Trimmer, W.S.N.: Integrated fabrication of polysilicon mechanisms. IEEE Trans. Electron. Dev. 35, 719 (1988).Google Scholar
7.Tavrow, L.S., Bart, S.F., and Lang, J.H.: Operational characteristics of microfabricated electric motors. Sens. Actuators, A 35, 33 (1992).CrossRefGoogle Scholar
8.Chen, L.Y. and Hong, F.C.N.: Diamond-like carbon nanocomposite films. Appl. Phys. Lett. 82, 3526 (2003).CrossRefGoogle Scholar
9.Mckenzie, D.R., Muller, D., and Pailthorpe, B.A.: Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon. Phys. Rev. Lett. 67, 773 (1991).CrossRefGoogle ScholarPubMed
10.Ban, M., Hasegawa, T., Fujii, S., and Fujioka, J.: Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD. Diamond Relat. Mater. 12, 47 (2003).Google Scholar
11.Foong, Y.M., Hsieh, J., Li, X., and Chua, D.H.C.: The study on the effect of erbium on diamond-like carbon deposited by pulsed laser deposition technique. J. Appl. Phys. 106, 064904 (2009).CrossRefGoogle Scholar
12.Dimigen, H. and Kiages, C-P.: Microstructure and wear behavior of metal-containing diamond-like coatings. Surf. Coat. Technol. 49, 543 (1991).CrossRefGoogle Scholar
13.Wei, Q., Sharma, A.K., Sankar, J., and Narayan, J.: Mechanical properties of diamond-like carbon composite thin films prepared by pulsed laser deposition. Composites Part B 30, 675 (1999).Google Scholar
14.Marciano, F.R., Bonetti, L.F., Pessoa, R.S., Marcuzzo, J.S., Massi, M., Santos, L.V., and Trava-Airoldi, V.J.: The improvement of DLC film lifetime using silver nanoparticles for use on space devices. Diamond Relat. Mater. 17, 1674 (2008).Google Scholar
15.Lide, D.R.: CRC Handbook of Chemistry and Physics, 89th ed. (CRC, Boca Raton, FL, 2008).Google Scholar
16.Wei, Q., Narayan, R.J., Narayan, J., Sankar, J., and Sharma, A.K.: Improvement of wear resistance of pulsed laser deposited diamond-like carbon films through incorporation of metals. Mater. Sci. Eng., B 53, 262 (1998).Google Scholar
17.Musil, J., Louda, M., Soukup, Z., and Kubásek, M.: Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films. Diamond Relat. Mater. 17, 1905 (2008).CrossRefGoogle Scholar
18.Chen, C.C. and Hong, F.C.N.: Structure and properties of diamond-like carbon nanocomposite films containing copper nanoparticles. Appl. Surf. Sci. 242, 256 (2005).Google Scholar
19.Corbella, C., Bertran, E., Polo, M.C., Pascual, E., and Andújar, J.L.: Structural effects of nanocomposite films of amorphous carbon and metal deposited by pulsed-DC reactive magnetron sputtering. Diamond Relat. Mater. 16, 1828 (2007).CrossRefGoogle Scholar
20.Zhao, X., He, X., Sun, Y., Yi, J., and Xiao, P.: Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition. Acta Mater. 57, 893 (2009).CrossRefGoogle Scholar
21.Jiang, W., Wang, H., Kim, I., Bae, I-T., Li, G., Nachimuthu, P., Zhu, Z., Zhang, Y., and Weber, W.J.: Response of nanocrystalline 3 C silicon carbide to heavy-ion irradiation. Phys. Rev. B 80, 161301R (2009).CrossRefGoogle Scholar
22.Tay, B.K., Xu, S., Tan, H.S., Yang, H.S., and Sun, Z.: Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc. Surf. Coat. Technol. 105, 155 (1998).CrossRefGoogle Scholar
23.Matsuyama, N., Yukimura, K., and Maruyama, T.: Amorphous diamond-like carbon film prepared by pulsed laser deposition with application of pulsed negative bias voltage. J. Appl. Phys. 89, 1938 (2001).CrossRefGoogle Scholar
24.Lucchese, M.M., Stavale, F., Martins Ferreira, E.H., Vilani, C., Moutinho, M.V.O., Capaz, R.B., Achete, C.A., and Jorio, A.: Quantifying ion-induced defects and Raman relaxation length in graphene. Carbon 48, 1592 (2010).Google Scholar
25.Ferrari, A.C. and Robertson, J.: Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B 61, 14095 (2000).Google Scholar
26.Ji, L., Li, H., Zhao, F., Chen, J., and Zhou, H.: Microstructure and mechanical properties of Mo/DLC nanocomposite films. Diamond Relat. Mater. 17, 1949 (2008).Google Scholar
27.Tamor, M.A. and Vassell, W.C.: Raman “fingerprinting” of amorphous carbon films. J. Appl. Phys. 76, 3823 (1994).Google Scholar
28.Sheeja, D., Tay, B.K., Lau, S.P., and Xu, S.: Tribological properties and adhesive strength of DLC coatings prepared under different substrate bias voltages. Wear 249, 433 (2001).Google Scholar
29.Xu, S., Tay, B.K., Tan, H.S., Zhong, L., Tu, Y.Q., Silva, S.R.P., and Milne, W.I.: Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy. J. Appl. Phys. 79, 7234 (1996).Google Scholar
30.Chastain, J.: Handbook of X-Ray Photoelectron Spectroscopy (Perkin Elmer Corporation, Eden Prairie, MN, 1992).Google Scholar
31.Kim, D., Jang, H.S., Kim, Y.S., Choi, D.H., Choi, B.K., Lee, J.H., You, Y.Z., and Chun, H.G.: Growth and characteristics of diamond-like carbon (DLC) films deposited by direct negative carbon ion beam deposition. Nucl. Instrum. Methods Phys. Res., Sect. B 254, 93 (2007).Google Scholar
32.Jouan, P-Y., Peignon, M-C., Cardinaud, Ch., and Lempérière, G.: Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy. Appl. Surf. Sci. 68, 595 (1993).Google Scholar
33.Ouerghi, A., Kahouli, A., Lucot, D., Portail, M., Travers, L., Gierak, J., Penuelas, J., Jegou, P., Shukla, A., Chassagne, T., and Zielinski, M.: Epitaxial graphene on cubic SiC(111)/Si(111) substrate. Appl. Phys. Lett. 96, 191910 (2010).CrossRefGoogle Scholar
34.Watts, J.F. and Wolstenholme, J.: An Introduction to Surface Analysis by XPS and AES (John Wiley & Sons Ltd, West Sussex, England, 2003).Google Scholar
35.Downs, R.T., Bartelmehs, K.L., Gibbs, G.V., and Boisen, M.B. Jr.: Interactive software for calculating and displaying X-ray or neutron powder diffractometer patterns of crystalline materials. Am. Mineral. 78, 1104 (1993).Google Scholar
36.Singh, R.K. and Narayan, J.: Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical model. Phys. Rev. B 41, 8843 (1990).Google Scholar
37.Willmott, P.R. and Huber, J.R.: Pulsed laser vaporization and deposition. Rev. Mod. Phys. 72, 315 (2000).Google Scholar
38.Chen, F.F.: Plasma Diagnostic Techniques, edited by Huddlestone, R. H. and Leonard, S. L. (Academic, London), p. 1.Google Scholar
39.Anisimov, S.I., Bityurin, N.M., and Luk’yanchuk, B.S.: Photo-Excited Processes, Diagnostics and Applications (PEPDA), edited by Peled, A. (Kluwer Academic, Dordrecht, The Netherlands, 2003), p. 121159.Google Scholar
40.Cuomo, J.J., Pappas, D.L., Bruely, J., Doyle, J.P., and Saenger, K.L.: Vapor deposition processes for amorphous carbon films with sp3 fractions approaching diamond. J. Appl. Phys. 70, 1706 (1991).Google Scholar
41.Lossy, R., Pappas, D.L., Roy, R.A., Doyle, J.P., Cuomo, J.J., and Bruley, J.: Properties of amorphous diamond films prepared by a filtered cathodic arc. J. Appl. Phys. 77, 4750 (1995).Google Scholar
42.Lifshitz, Y., Edrei, R., Hoffman, A., Grossman, E., Lempert, G.D., Berthold, J., Schultrich, B., and Jäger, H.U.: Surface roughness evolution and growth mechanism of carbon films from hyperthermal species. Diamond Relat. Mater. 16, 1771 (2007).Google Scholar
43.Porter, D.A. and Easterling, K.E.: Phase Transformation in Metals and Alloys, 2nd Edition (CRC Press, Cheltenham, England, 1992).Google Scholar
44.Egelhoff, W.F. Jr. and Tibbetts, G.G.: Growth of copper, nickel, and palladium films on graphite and-amorphous carbon. Phys. Rev. B 19, 5028 (1979).Google Scholar
45.Hamilton, J.F. and Logel, P.C.: Catalysis of electroless nickel deposition by small palladium nuclei. J. Catal. 39, 253 (1973).Google Scholar
46.Zhou, W., Han, Z., Wang, J., Zhang, Y., Jin, Z., Sun, X., Zhang, Y., Yan, C., and Li, Y.: Copper catalyzing growth of single-walled carbon nanotubes on substrates. Nano Lett. 6, 2987 (2006).CrossRefGoogle ScholarPubMed
47.Rasool, H.I., Song, E.B., Allen, M.J., Wassei, J.K., Kaner, R.B., Wang, K.L., Weiller, B.H., and Gimzewski, J.K.: Continuity of graphene on polycrystalline copper. Nano Lett. 11, 251 (2011).Google Scholar
48.Cheung, C.L., Kurtz, A., Park, H., and Lieber, C.M.: Diameter-controlled synthesis of carbon nanotubes. J. Phys. Chem. B 106, 2429 (2002).Google Scholar
49.Matenoglou, G., Evangelakis, G.A., Kosmidis, C., Foulias, S., Papadimitriou, D., and Patsalas, P.: Pulsed laser deposition of amorphous carbon/silver nanocomposites. Appl. Surf. Sci. 253, 8155 (2007).CrossRefGoogle Scholar
50.Andara, M., Agarwal, A., Scholvin, D., Gerhardt, R.A., Doraiswamy, A., Jin, C., Narayan, R.J., Shih, C.C., Shih, C.M., Lin, S.J., and Su, Y-Y.: Hemocompatibility of diamondlike carbon–metal composite thin films. Diamond Relat. Mater. 15, 1941 (2006).Google Scholar
51.Narayan, R.J.: Laser processing of diamond-like carbon–metal composites. Appl. Surf. Sci. 245, 420 (2005).Google Scholar
52.Wong, H., Foong, Y.M., and Chua, D.H.C.: Improving the conductivity of diamond-like carbon films with zinc doping and its material properties. Appl. Surf. Sci. 257, 9616 (2011).CrossRefGoogle Scholar
53.Wei, Q., Sankar, J., Sharma, A.K., Oktyabsky, S., Narayan, J., and Narayan, R.J.: Atomic structure, electrical properties, and infrared range optical properties of diamondlike-carbon films containing foreign atoms prepared by pulsed laser deposition. J. Mater. Res. 15, 633 (2000).CrossRefGoogle Scholar
54.Koh, A.T.T., Hsieh, J., and Chua, D.H.C.: Structural characterization of dual-metal containing diamond-like carbon nanocomposite films by pulsed laser deposition. Diamond Relat. Mater. 19, 637 (2010).CrossRefGoogle Scholar
55.Lifshitz, Y., Kasi, S.R., and Rabalais, J.W.: Subplantation model for film growth from hyperthermal species: Application to diamond. Phys. Rev. Lett. 62, 1290 (1989).Google Scholar
56.Lifshitz, Y., Lempert, G.D., and Grossman, E.: Substantiation of subplantation model for diamondlike film growth by atomic force microscopy. Phys. Rev. Lett. 72, 2753 (1994).CrossRefGoogle ScholarPubMed
57.Grill, A.: Electrical and optical properties of diamond-like carbon. Thin Solid Films 355, 189 (1999).CrossRefGoogle Scholar
58.Weng, K.W., Chen, Y.C., Lin, T.N., and Wang, D.Y.: Metal-doped diamond-like carbon films synthesized by filter-arc deposition. Thin Solid Films 515, 1053 (2006).CrossRefGoogle Scholar
59.Ahmad, I., Roy, S.S., Rahman, M.A., Okpalugo, T.I.T., Maguire, P.D., and McLaughlin, J.A.: Substrate effects on the microstructure of hydrogenated amorphous carbon films. Curr. Appl. Phys. 9, 937 (2009).Google Scholar
60.Sheeja, D., Tay, B.K., Lau, S.P., Shi, X., Shi, J., Li, Y., Ding, X., Liu, E., and Sun, Z.: Characterization of ta-C films prepared by a two-step filtered vacuum arc deposition technique. Surf. Coat. Technol. 127, 246 (2000).Google Scholar