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Growth and thermal stability of (V,Al)2Cx thin films

Published online by Cambridge University Press:  05 July 2012

Yan Jiang ,
Riza Iskandar ,
Moritz to Baben ,
Tetsuya Takahashi ,
Jie Zhang ,
Jens Emmerlich ,
Joachim Mayer ,
Conrad Polzer ,
Peter Polcik  and
Jochen M. Schneider
Yan Jiang*
Affiliation:
Materials Chemistry, RWTH Aachen University, 52074 Aachen, Germany
Riza Iskandar
Affiliation:
Central Facility for Electron Microscopy, RWTH Aachen University, 52074 Aachen, Germany
Moritz to Baben
Affiliation:
Materials Chemistry, RWTH Aachen University, 52074, Aachen, Germany
Tetsuya Takahashi
Affiliation:
Materials Chemistry, RWTH Aachen University, 52074, Aachen, Germany
Jie Zhang
Affiliation:
Materials Chemistry, RWTH Aachen University, 52074, Aachen, Germany
Jens Emmerlich
Affiliation:
Materials Chemistry, RWTH Aachen University, 52074, Aachen, Germany
Joachim Mayer
Affiliation:
Central Facility for Electron Microscopy, RWTH Aachen University, 52074, Aachen, Germany
Conrad Polzer
Affiliation:
Plansee Composite Materials GmbH, 86983 Lechbruck am See, Germany
Peter Polcik
Affiliation:
Plansee Composite Materials GmbH, 86983 Lechbruck am See, Germany
Jochen M. Schneider
Affiliation:
Materials Chemistry, RWTH Aachen University, 52074 Aachen, Germany
*
a)Address all correspondence to this author. e-mail: yan.jiang@mch.rwth-aachen.de
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Abstract

Vanadium (V)–aluminum (Al)–carbon (C) thin films were deposited on Al2O3$(11\mathop 2\limits^ - 0)$ substrates at 500 °C by direct current magnetron sputtering using a powder metallurgical composite target with 2:1:1 MAX phase stoichiometry. Transmission electron microscopy (TEM) and x-ray diffraction results suggest that a hexagonal Al-containing vanadium carbide solid solution (V,Al)2Cx was formed. The films exhibited a strong basal plane texture. The lattice parameter of the hexagonal solid solution was dependent on the annealing temperature: the c lattice parameter decreased by 3.45% after annealing for 1 h at 750 °C compared to the as-deposited film. Based on the comparison between experimental and theoretical lattice parameter data, it is reasonable to assume that this annealing-induced change in lattice parameter is a consequence of atomic ordering. Meanwhile, the formation of V2AlC MAX phase was observed at 650 °C and phase-pure V2AlC was obtained at 850 °C. TEM images support the notion that V2AlC forms by nucleation and growth.

Keywords

crystal growthsputteringtexture
Type
Articles
Information
Journal of Materials Research , Volume 27 , Issue 19 , 14 October 2012 , pp. 2511 - 2519
Copyright
Copyright © Materials Research Society 2012

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