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3D Elemental Mapping Using X-Ray Spectrometry in a Dual Beam-Focused Ion Beam

Published online by Cambridge University Press:  31 July 2006

J Wagner ,
M Hunkova ,
M Schmied ,
H Mulders  and
M Novak
J Wagner
Affiliation:
Graz University of Technology
M Hunkova
Affiliation:
Graz University of Technology
M Schmied
Affiliation:
Graz University of Technology
H Mulders
Affiliation:
FEI Company
M Novak
Affiliation:
FEI Company

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1242 - 1243
Copyright
© 2006 Microscopy Society of America