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3D Microscopy and Microanalysis of Heterogeneous SEM Samples by Broad Ion Beam Processing: Cutting - Etching - Coating

Published online by Cambridge University Press:  01 August 2002

W. Hauffe ,
D. Glöß  and
R.J. Mitro
W. Hauffe
Affiliation:
Physics Department, Dresden University of Technology, D-01062 Dresden, Germany
D. Glöß
Affiliation:
Physics Department, Dresden University of Technology, D-01062 Dresden, Germany
R.J. Mitro
Affiliation:
Gatan R&D, 5933 Coronado Lane, Pleasanton, CA 94588, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 552 - 553
Copyright
Copyright © Microscopy Society of America 2002