Monte Carlo simulation of electron scattering has been widely used in various fields such as microanalysis, microscopy and microlithography. Various simulation models have been reported so far. in applications to quantitative x-ray microanalysis the accuracy of the model has been significantly improved by introducing the Mott cross section. However, in the analyses at low energies of an electron beam or at energies near the x-ray excitation energy, the simulation accuracy becomes worse. This is probably because the discrete energy loss process is not incorporated into the simulation model. to improve this default, we developed the model which includes the discrete energy loss process[l]. The outline of the model is described in the following.

1. 1) Elastic scattering

We used the Mott cross section. The Mott cross sections for Al, Cu, Ag and Au elements are calculated at various energies. From this data base we obtain the differential elastic scattering cross section and the total elastic cross section for arbitarary elements and energies by using the interporation or the extrapolation.