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Characterization of TaN thin films synthesized by ICP assisted sputtering

Published online by Cambridge University Press:  03 August 2008

S-I Baik ,
J-W Park ,
T-Y Ahn ,
G-R Lee ,
J-J Lee  and
Y-W Kim
S-I Baik
Affiliation:
Seoul National University, Korea
J-W Park
Affiliation:
Seoul National University, Korea
T-Y Ahn
Affiliation:
Seoul National University, Korea
G-R Lee
Affiliation:
Seoul National University, Korea
J-J Lee
Affiliation:
Seoul National University, Korea
Y-W Kim
Affiliation:
Seoul National University, Korea
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 330 - 331
Copyright
© 2008 Microscopy Society of America

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