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Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

Published online by Cambridge University Press:  16 September 2009

A.R. Lupini ,
A.Y. Borisevich ,
J.C. Idrobo ,
H.M. Christen ,
M. Biegalski  and
S.J. Pennycook
A.R. Lupini*
Affiliation:
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA
A.Y. Borisevich
Affiliation:
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA
J.C. Idrobo
Affiliation:
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA
H.M. Christen
Affiliation:
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA
M. Biegalski
Affiliation:
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA
S.J. Pennycook
Affiliation:
Oak Ridge National Laboratory, 1 Bethel Valley Road, Oak Ridge, TN 37831, USA
*
Corresponding author. E-mail: 9az@ornl.gov
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Abstract

The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.

Keywords

STEMaberrationsphericalresolution3D
Type
Instrumentation and Software Development
Information
Microscopy and Microanalysis , Volume 15 , Issue 5 , October 2009 , pp. 441 - 453
Copyright
Copyright © Microscopy Society of America 2009

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References

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