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Determination of Strain in the Silicon Channel Induced by a Metal Electrode

Published online by Cambridge University Press:  05 August 2007

HC Floresca ,
J Wang ,
M Kim ,
J Kim ,
CY Kang ,
R Choi ,
SC Song ,
HH Tseng ,
BH Lee  and
R Jammy
HC Floresca
Affiliation:
University of Texas at Dallas
J Wang
Affiliation:
University of Texas at Dallas
M Kim
Affiliation:
University of Texas at Dallas
J Kim
Affiliation:
University of Texas at Dallas
CY Kang
Affiliation:
SEMATECH
R Choi
Affiliation:
SEMATECH
SC Song
Affiliation:
SEMATECH
HH Tseng
Affiliation:
SEMATECH
BH Lee
Affiliation:
IBM
R Jammy
Affiliation:
IBM
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 838 - 839
Copyright
© 2007 Microscopy Society of America

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