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DualBeam Milling and Deposition of Complex Structures Using Bitmap Files and Digital Patterning

Published online by Cambridge University Press:  01 August 2004

Paul A Anzalone ,
John F Mansfield  and
Lucille A Giannuzzi
Paul A Anzalone
Affiliation:
FEI Company, Hillsboro, Oregon
John F Mansfield
Affiliation:
University of Michigan
Lucille A Giannuzzi
Affiliation:
FEI Company, Hillsboro, Oregon
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1154 - 1155
Copyright
© 2004 Microscopy Society of America

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