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Energy-Filtering Techniques for Thick Samples
Published online by Cambridge University Press: 02 July 2020
Extract
Imaging of sample regions with a thickness significantly larger than the extinction length and strong thickness variations introduces two major problems for transmission electron microscopy (TEM) : (i) inelastic scattering increases the energy width of the transmitted electrons and therefore the resolution decreases (ii) the contrast differences caused by thickness variations can be higher than the dynamic range of the detector system.
Both problems can be solved by using energy filtering techniques. The advantage here is that for energy filtered imaging the resolution limit is not determined by the sample thickness but by the width of the energy selection aperture. Fig. 1 shows three envelope functions of the temporal coherence calculated for different values of the energy width. The functions were plotted for an acceleration voltage of 200 kV and a high voltage stability of 2 ppm.
- Type
- Electron Energy-Loss Spectroscopy (EELS) and Imaging
- Information
- Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 166 - 167
- Copyright
- Copyright © Microscopy Society of America