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Epitaxial Orientation Determination of Nanosized Particles by EBSD
Published online by Cambridge University Press: 02 July 2020
Extract
Metals on oxide systems are important in applications such as catalysts and gas sensors. The Au/ TiO2 system is of particular interest because of its high activity for low temperature oxidation of CO and its good sensitivity as CO gas sensor. In this study, we are reporting results on the effect of substrate temperature on epitaxial orientation relationship of Au particles formed on TiO2 (110).
Two Au films were grown on TiO2 (110) substrates by vapor deposition in a UHV chamber. The first one was produced by evaporation of a 12nm thick Au film at 300K, followed by annealing at 775K for 1 hour. The second one was produced by direct deposition of a 12nm film on TiO2 substrate maintained at 775K. The samples were transferred in air to the Field Emission Scanning Electron microscope (LEO 982 Gemini) for imaging and diffraction. .Electron Backscatter Diffraction (EBSD) patterns were taken from individual Au particles using the Opal system (Oxford Instruments). With this system, a spatial resolution of the order of 80 nm has been achieve for Au.
A typical HRSEM image of the Au film deposited a 300K and annealed at 775K is shown in Fig. 1 revealing a discontinuous Au film consisting of discrete Au particles in the range from 20 to 150 nm.
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- Electron diffraction in the SEM: automated EBSP and its application
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- Copyright © Microscopy Society of America