Hostname: page-component-7479d7b7d-qs9v7 Total loading time: 0 Render date: 2024-07-11T06:33:08.510Z Has data issue: false hasContentIssue false
  • English
  • Français

Experimental Method to Measure the Detective Quantum Efficiency of a Charge-Coupled Device Camera for Electron Microscopy.

Published online by Cambridge University Press:  02 July 2020

P. Favia ,
S. Cooper  and
P. E. Mooney
P. Favia
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA95488, USA
S. Cooper
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA95488, USA
P. E. Mooney
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA95488, USA
Get access

Extract

The Detective Quantum Efficiency (DQE) is one of the best parameters to characterize the performance of a charge-coupled device (CCD) camera when electron dose is an issue. This can be when there are beam source brightness limitations as in high-resolution applications or when specimen dose must be limited. For single parameter detectors such as a backscatter detector in a SEM, the DQE is defined as the square of the signal-to noise ratio (SNR) at the output divided by the square of the signal-to-noise ratio at the input:

where S, N, and n are respectively the signal, the noise and the electron dose. This definition is not valid to describe the performance of a multi-component device as an imaging detector. In fact a CCD camera is composed of many elements or pixels.

Type
Instrument Performance
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1134 - 1135
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Herrmann, K.-H. and Krahl, D., Advances in Optical and Electron Microscopy, Vol. 9 (Ed. Barer, R. and Cosslet, V.E.). Academic Press, London and New York, 1984, p.lGoogle Scholar

2 Daberkow, I., et al., Ultramicroscopy 38, (1991), p.215CrossRefGoogle Scholar

3 Ishizuka, K., Ultramicroscopy 52 (1993) p.7CrossRefGoogle Scholar

4 Ruijter, W. J. de et al., Proc. 51st Annual Meeting of the Microscopy Society of America, Ed. Baiiley, G. W. and Rieder, C.L., San Francisco Press, San Francisco, 1993, p.Google Scholar

5 Ruijter, W. J. de, Micron, Vol.26, No.3, 1995, p.247CrossRefGoogle Scholar

6 Ruijter, W. J. de and Weiss, J. K., Rev. Sci. Instrum., 63, 1992, p.4314CrossRefGoogle Scholar

7 Meyer, R. R. and Kirkland, A. I., Ultramicroscopy, Vol. 75, No.l, October 1998, p.23CrossRefGoogle Scholar