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Focused Ion Beam Induced Microstructural Alterations: Texture Development, Grain Growth, and Intermetallic Formation

Published online by Cambridge University Press:  06 April 2011

Joseph R. Michael
Joseph R. Michael*
Affiliation:
Sandia National Laboratories, Materials Characterization Department, P.O. Box 5800 MS 0886, Albuquerque, NM 87185-0886, USA
*
Corresponding author. E-mail: jrmicha@sandia.gov
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Abstract

Copper, gold, and tungsten thin films have been exposed to 30 kV Ga+ ion irradiation, and the resulting microstructural modifications are studied as a function of ion dose. The observed microstructural changes include texture development with respect to the easy channeling direction in the target, and in the case of Cu, an additional intermetallic phase is produced. Texture development in these target materials is a function of the starting materials grain size, and these changes are not observed in large grained materials. The accepted models of differential damage driven grain growth are not supported by the results of this study. The implications of this study to the use of focused ion beam tools for sample preparation are discussed.

Keywords

focused ion beamradiation damageSEMEBSDtextureTEM
Type
Materials Applications
Information
Microscopy and Microanalysis , Volume 17 , Issue 3 , June 2011 , pp. 386 - 397
Copyright
Copyright © Microscopy Society of America 2011

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