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Future Direction of High-Resolution X-Ray Microanalysis in the AEM

Published online by Cambridge University Press:  02 July 2020

M. Watanabe  and
D.B. Williams
M. Watanabe
Affiliation:
Res. Lab. High Voltage Electron Microscopy, Kyushu University, Fukuoka, 812-8581, Japan
D.B. Williams
Affiliation:
Dept. Materials Science and Engineering, Lehigh University, Bethlehem, PA18015, USA
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Abstract

Current commercial analytical electron microscopes (AEMs) including scanning transmission electron microscopes (STEMs) are a compromise design between the highest spatial, analytical and energy resolutions. in contrast, a VG HB603 STEM at Lehigh University has been designed with a 300 kV cold field-emission gun and twin X-ray detectors to maximize X-ray generation and collection efficiencies [1]. in addition, instrumental features of almost no stray radiation, ultra-high vacuum (<10−7 Pa in the stage and <10−7 Pa in the gun), beam blanking and direct probe-current measurement in the HB 603 have transformed the approaches to quantitative analysis. By using such modern AEMs, it is now possible to perform X-ray microanalysis with the spatial resolution as low as 1.5 nm and the detectability limits of∽2 atoms in the analyzed volume [2]. Furthermore, even quantitative X-ray mapping becomes achievable, while maintaining, high spatial resolution (the original aim of such instruments) [3].

Type
Quantitative STEM: Imaging and EELS Analysis Honoring the Contributions of John Silcox (Organized by P. Batson, C. Chen and D. Muller)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 212 - 213
Copyright
Copyright © Microscopy Society of America 2001

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References

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