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Highly Automated Electron Energy-Loss Spectroscopy Elemental Quantification

Published online by Cambridge University Press:  10 April 2014

Raman D. Narayan ,
J. K. Weiss  and
Peter Rez
Raman D. Narayan*
Affiliation:
AppFive LLC, 1095 West Rio Salado Parkway, Suite 110, Tempe, AZ 85281, USA
J. K. Weiss
Affiliation:
AppFive LLC, 1095 West Rio Salado Parkway, Suite 110, Tempe, AZ 85281, USA
Peter Rez
Affiliation:
Department of Physics, Arizona State University, PO Box 871504, Tempe, AZ 85287, USA
*
*Corresponding author.raman@appfive.com
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Abstract

A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.

Keywords

EELSquantificationmodelfittingplural scatteringmultiple scattering
Type
EDGE Special Issue
Information
Microscopy and Microanalysis , Volume 20 , Issue 3 , June 2014 , pp. 798 - 806
Copyright
© Microscopy Society of America 2014 

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