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A Microcalorimeter for High Resolution EDS Microanalysis in Low Voltage SEM Applications
Published online by Cambridge University Press: 02 July 2020
Abstract
As scientists look to determine elemental composition of smaller and smaller particles using a scanning electron microscope, the usefulness of conventional EDS detectors (Si(Li)) becomes limited. to obtain analytical information from the SEM on extremely small particles the analyst can reduce the excitation energy of the electron beam; excitation energies of around 3kV are regularly used for the analysis of these particles. with only low energies (up 3keV) to work with, the scientists have to use L, or in some cases M, spectra to determine the chemical composition of the particle. A standard Si (Li) with a resolution of ≈100eV @3keV (130eV at 6keV) will be unable to adequately resolve spectra for confident characterization work to be carried out for these low energy lines. A new generation of EDS detectors for microanalysis is required to fulfill the scientists requirements for fast, simultaneous chemical determination of these small particles.
- Type
- Frontiers of X-Ray Spectrometry (Eds and Wds) in Microanalysis (Organized by D. Newbury and J. H. Scott)
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- Copyright
- Copyright © Microscopy Society of America 2001