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Nanolithography of Electrically Insulating Materials Using Simultaneous Defocused Primary Electron Beam and Focused Ion Beam Irradiation

Published online by Cambridge University Press:  05 August 2007

D Stokes ,
T Vystavel  and
O Wilhelmi
D Stokes
Affiliation:
FEI Company,The Netherlands
T Vystavel
Affiliation:
FEI Company,Czech Republic
O Wilhelmi
Affiliation:
FEI Company,The Netherlands
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1496 - 1497
Copyright
© 2007 Microscopy Society of America

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