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A New High Performance Electron Energy Loss Spectrometer for use with Monochromated Microscopes

Published online by Cambridge University Press:  02 July 2020

H.A. Brink ,
M. Barfels ,
B. Edwards  and
P. Burgner
H.A. Brink
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
M. Barfels
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
B. Edwards
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
P. Burgner
Affiliation:
Gatan Research & Development, 5933 Coronado Lane, Pleasanton, CA, 94588, USA
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Abstract

A new type of electron energy loss spectrometer for use with monochromated microscopes is presented. The energy resolution of the spectrometer is better than 0.100 eV. A completely new electron optical design with a number of extra optical elements and advanced tuning software makes it possible to correct spectrum aberrations to 4th order, which increases sensitivity and collection angles. New high-stability electronics make it possible to maintain energy resolution over a period of several minutes in a practical laboratory environment.

The energy resolution of Transmission Electron Microscopes (TEMs) equipped with electron energy loss spectrometers is determined by a combination of the energy spread of the electron source, the stability of the microscope’s high voltage power supply, and the energy resolution of the spectrometer. Commercial microscopes usually employ electron sources with an energy distributions of around 0.5 eV or more (FWHM), limiting the energy ultimate energy resolution that can be achieved. Recently FEI constructed a special 200 kV TEM with a built-in monochromator which makes it possible to monochromize the electron source to better than 0.100 eV. A prototype of the presented spectrometer has been installed on this microscope.

Type
TEM Instrument Development (Organized by D. Smith and L. Allard)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 908 - 909
Copyright
Copyright © Microscopy Society of America 2001

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References

references

1.Egerton, R.F., Electron Energy Loss Spectroscopy, 2na edition, 96–112Google Scholar
2.Tiemeijer, P.C., van Lin, J.H.A., and de Jong, A.F., see elsewhere in these proceedingsGoogle Scholar