Hostname: page-component-77c89778f8-gq7q9 Total loading time: 0 Render date: 2024-07-18T23:35:41.098Z Has data issue: false hasContentIssue false

A New Parametrization of Mott Scattering Cross Section for Monte Carlo Simulation

Published online by Cambridge University Press:  02 July 2020

Hendrix Demers
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada, J1K 2R1
Raynald Gauvin
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, Canada, J1K 2R1
Get access

Extract

In the recent years the Monte-Carlo simulation has been used successfully to exploit and understand fully the capabilities of electron microscopes. In this paper, we propose a new parametrization of Mott scattering cross-section for the calculation of the total cross-section as well as the polar angle of collision. This parametrization gives better results than Rutherford cross-section for Monte Carlo simulation at low beam energy without the numerous data files needed to use the exact Mott cross-section.

The calculation of elastic scattering cross-section can be performed with the Rutherford equation using the screening parameter, δ, the energy of the incident electron, and the electron wavelength, differential cross-section is given by:

Type
X-Ray Microanalysis of Rough Surfaces
Copyright
Copyright © Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

References:

1Drouin, D. et al., CASINO: A new Monte Carlo code in C language for the electron beam interactions - Part II: Tabulated values of the Mott Cross Section, SCANNING, Vol. 19 2028 (1997).CrossRefGoogle Scholar
2Czyzewski, Z. et al., Calculations of Mott scattering cross section, J. Appl. Phys. 68 (7), 1990, 30663072.CrossRefGoogle Scholar
3Gauvin, R., X-Ray emission from parous materials: new results, Microscopy & Microanalysis, Vol. 4, Supp. 2, 206207(1998).Google Scholar
4Newbury, D. E. et al., Advanced Scanning Electron Microscopy and X-Ray Microanalysis, Plenum Press (1986)56.Google Scholar
5Reimer, L., Scanning electron microscopy: Physics of image formation and microanalysis, Springer series in optical sciences, Vol. 45 (1998).CrossRefGoogle Scholar