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Novel Fabrication of Carbon Nanotube Vias for VLSI Interconnects

Published online by Cambridge University Press:  03 August 2008

J Wu ,
J Walenza-Slabe ,
M Mann ,
KBK Teo ,
WI Milne  and
J Jiao
J Wu
Affiliation:
Portland State University
J Walenza-Slabe
Affiliation:
Portland State University
M Mann
Affiliation:
University of Cambridge, United Kingdom
KBK Teo
Affiliation:
University of Cambridge, United Kingdom
WI Milne
Affiliation:
University of Cambridge, United Kingdom
J Jiao
Affiliation:
Portland State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 298 - 299
Copyright
© 2008 Microscopy Society of America

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