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A Piezoelectric Goniometer Inside a Transmission Electron Microscope Goniometer

Published online by Cambridge University Press:  13 September 2011

Wei Guan ,
Aiden Lockwood ,
Beverley J. Inkson  and
Günter Möbus
Wei Guan*
Affiliation:
NanoLAB Centre, Department of Materials Science and Engineering, University of Sheffield, Sheffield S1 3JD, UK
Aiden Lockwood
Affiliation:
NanoLAB Centre, Department of Materials Science and Engineering, University of Sheffield, Sheffield S1 3JD, UK
Beverley J. Inkson
Affiliation:
NanoLAB Centre, Department of Materials Science and Engineering, University of Sheffield, Sheffield S1 3JD, UK
Günter Möbus*
Affiliation:
NanoLAB Centre, Department of Materials Science and Engineering, University of Sheffield, Sheffield S1 3JD, UK
*
Corresponding author. E-mail: w.guan@sheffield.ac.uk
Corresponding author. E-mail: g.moebus@sheffield.ac.uk
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Abstract

Piezoelectric nanoactuators, which can provide extremely stable and reproducible positioning, are rapidly becoming the dominant means for position control in transmission electron microscopy. Here we present a second-generation miniature goniometric nanomanipulation system, which is fully piezo-actuated with ultrafine step size for translation and rotation, programmable, and can be fitted inside a hollowed standard specimen holder for a transmission electron microscope (TEM). The movement range of this miniaturized drive is composed of seven degrees of freedom: three fine translational movements (X, Y, and Z axes), three coarse translational movements along all three axes, and one rotational movement around the X-axis with an integrated angular sensor providing absolute rotation feedback. The new piezoelectric system independently operates as a goniometer inside the TEM goniometer. In situ experiments, such as tomographic tilt without missing wedge and differential tilt between two specimens, are demonstrated.

Keywords

in situ TEMelectron tomographynanomanipulationpiezo drive
Type
Equipment/Techniques Development
Information
Microscopy and Microanalysis , Volume 17 , Issue 5 , October 2011 , pp. 827 - 833
Copyright
Copyright © Microscopy Society of America 2011

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References

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