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Quantitative Dopant Contrast in Scanning Electron Microscope and Helium Ion Microscope Using Focused Ion Beam Prepared Specimens

Published online by Cambridge University Press:  23 November 2012

H. Zhang
Affiliation:
Trinity College Dublin, Dublin, Ireland
Y. Chen
Affiliation:
Trinity College Dublin, Dublin, Ireland
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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