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Quantitative Energy-Filtering Transmission Electron Microscopy (EFTEM) In Materials Science

Published online by Cambridge University Press:  02 July 2020

F. Hofer ,
W. Grogger  and
P. Warbichler
F. Hofer
Affiliation:
Research Institute for Electron Microscopy, Graz University of Technology, A-8010, Graz, Austria
W. Grogger
Affiliation:
Research Institute for Electron Microscopy, Graz University of Technology, A-8010, Graz, Austria
P. Warbichler
Affiliation:
Research Institute for Electron Microscopy, Graz University of Technology, A-8010, Graz, Austria
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Extract

Equipping a transmission electron microscope with an energy-filter offers extraordinary advantages for the characterization of both materials science and biological samples. Besides improvements for TEM imaging and electron diffraction like better contrast and resolution, elemental mapping using inner-shell ionizations has become the main application of EFTEM. Elemental maps with resolution down to 1 nm and elemental sensitivities down to a single monolayer have been reported. Using a Philips CM20 equipped with a Gatan Imaging Filter (GIF) for our experimental work, we acquired elemental maps with the three window method (A.E-1r background extrapolation from two pre-edge windows) and jump ratio images (division of post-edge image by a pre-edge image). One important application of EFTEM is the detection of secondary phases in materials e.g. precipitates and grain boundary phases. For example, fig.la shows the TEM-image of a 10%Cr steel with the secondary phases mostly invisible.

Type
Compositional Mapping With High Spatial Resolution
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 128 - 129
Copyright
Copyright © Microscopy Society of America

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References

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6. This work was supported by the Forschungsforderungsfonds der Gewerblichen Wirtschaft, Vienna, Austria. The aid of Dr. Gerald Kothleitner is gratefully acknowledged.Google Scholar