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Scanning Electron and Ion Microscope-based Size and Shape Metrology at the Nanometer Scale

Published online by Cambridge University Press:  03 August 2008

AE Vladár ,
P Cizmar  and
MT Postek
AE Vladár
Affiliation:
National Institute of Standards and Technology
P Cizmar
Affiliation:
National Institute of Standards and Technology
MT Postek
Affiliation:
National Institute of Standards and Technology
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 118 - 119
Copyright
© 2008 Microscopy Society of America

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