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Substitutional and Interstitial Diffusion of Ni across the NiSi/Si interface

Published online by Cambridge University Press:  23 November 2012

A. Thron ,
K. van Benthem ,
J. Chan ,
C.L. Hinkle ,
T.J. Pennycook ,
S.J. Pennycook  and
A. Jain
A. Thron
Affiliation:
UC Davis, Davis, CA
K. van Benthem
Affiliation:
UC Davis, Davis, CA
J. Chan
Affiliation:
UT Dallas, Dallas, TX
C.L. Hinkle
Affiliation:
UT Dallas, Dallas, TX
T.J. Pennycook
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN
S.J. Pennycook
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN
A. Jain
Affiliation:
Texas Instruments Inc., Dallas, TX
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 344 - 345
Copyright
Copyright © Microscopy Society of America 2012

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