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Surface Microanalysis with Slow Electrons
Published online by Cambridge University Press: 14 July 2006
Abstract
Microanalysis on the 10-nm level using imaging, diffraction, and spectroscopy of slow photo-emitted and reflected electrons is discussed. The instrumentation that uses a cathode lens is briefly reviewed, and a number of applications illustrate the power of this microanalysis method.
- Type
- MODERN DEVELOPMENTS AND APPLICATIONS IN MICROBEAM ANALYSIS
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- Copyright
- © 2006 Microscopy Society of America
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