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Three Dimensional Energy Filtered Transmission Electron Microscopy (3D-EFTEM)

Published online by Cambridge University Press:  02 July 2020

M Weyland  and
P.A. Midgley
M Weyland
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK
P.A. Midgley
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK
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Abstract

Energy filtered transmission electron microscopy (EFTEM) has been developed in recent years to be a highly flexible tool for spatially resolved microanalysis. The basic technique has been extended to allow fully quantitative mapping of single elements, or a large range of elements using an image-spectroscopy approach . All these techniques are still limited by the nature of the TEM as a structure projector; any elemental map is only a 2D projection of what is in reality a 3D structure. A fully 3D approach to EFTEM analysis would offer additional insights into many materials problems and make possible meaningful analysis of certain systems for the first time. Three-dimensional electron microscopy (electron tomography) offers one path for the reconstruction of 3D structures from 2D projections. Although this has been well developed for solving the structure of biological macromolecules and viruses its use in the physical sciences is quite new.

Type
EELS Microanalysis at High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1162 - 1163
Copyright
Copyright © Microscopy Society of America 2001

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References

References:

1.Reimer, L. (editor), Energy-Filtering Transmission Electron Microscopy, Springer-Verlag (1995).CrossRefGoogle Scholar
2.Thomas, P.J. and Midgley, P.A., Ultramicroscopy (2001), in press.Google Scholar
3.Frank, J. (editor), Electron Tomography, Plenum Press (1992).CrossRefGoogle Scholar
4.Koster, A.J. et al, J. Phys. Chem. B, 104 (2000) 9368–9370.CrossRefGoogle Scholar
5.Weyland, M., Thomas, P.J. and P.A.Midgley, , EUROMAT 4 (1999) 163–168.Google Scholar
6.Weyland, M., Midgley, P.A. and Thomas, J.M., these proceedings (2001).Google Scholar
7. The authors are grateful to BNFL Research and Technology for financial support and to Dr R.Broom for sample holder modification.Google Scholar