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The Tomographic Atom Probe: A New Dimension In Material Analysis

Published online by Cambridge University Press:  02 July 2020

B. Deconihout ,
P. Pareige ,
D. Blavette ,
A. Bostel  and
A. Menand
B. Deconihout
Affiliation:
Groupe de Métallurgie Physique UMR 6634 CNRS - Université et INSA de ROUEN, Faculté des Sciences de Rouen, 76821 Mont-Saint-Aignan CEDEX, FRANCE
P. Pareige
Affiliation:
Groupe de Métallurgie Physique UMR 6634 CNRS - Université et INSA de ROUEN, Faculté des Sciences de Rouen, 76821 Mont-Saint-Aignan CEDEX, FRANCE
D. Blavette
Affiliation:
Groupe de Métallurgie Physique UMR 6634 CNRS - Université et INSA de ROUEN, Faculté des Sciences de Rouen, 76821 Mont-Saint-Aignan CEDEX, FRANCE
A. Bostel
Affiliation:
Groupe de Métallurgie Physique UMR 6634 CNRS - Université et INSA de ROUEN, Faculté des Sciences de Rouen, 76821 Mont-Saint-Aignan CEDEX, FRANCE
A. Menand
Affiliation:
Groupe de Métallurgie Physique UMR 6634 CNRS - Université et INSA de ROUEN, Faculté des Sciences de Rouen, 76821 Mont-Saint-Aignan CEDEX, FRANCE
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Extract

Today material science requires the use of increasingly powerful tools in material analysis. The last twenty years have witnessed the development of a number of analytical techniques. However, among these techniques, only a few allow observation and analysis of materials at the nanometer level ; one can mention scanning transmission electron microscopy coupled with electron energy loss spectrometry (STEM-EELS), SIMS and atom-probe techniques. In the STEM combined with electron energy loss spectrometry the spatial resolution can be better than one nanometer on a wide scanning area. However the in-depth spatial resolution is limited by the specimen thickness and therefore strongly depends on samples preparation. On the contrary, In SIMS techniques the in-depth spatial resolution can be as good as one nanometer but the lateral resolution is set by the ion beam diameter.

Type
Imaging and Analysis at the Atomic Level: 30 Years of Atom Probe Field Ion Microscopy
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 78 - 79
Copyright
Copyright © Microscopy Society of America

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