An inevitable consequence of the presence of the gas in the sample chamber of a low-vacuum scanning electron microscope (LV-SEM) and environmental SEM (ESEM) is the electron beam broadening due to the scattering in the gas. The electron broadening has a large impact on x-ray analysis because the fluorescent characteristic x rays generated far from the center of the electron probe form a high background, which reduces the detection sensitivity of x-ray analysis and degrades the x-ray image contrast. We report in this paper of using a polycapillary focusing x-ray optic between the sample and the energy-dispersive spectrometer as a spatial filter to filter out unwanted x-rays generated far from the specimen. As a result, the x-ray image contrast and the detection sensitivity of the system were notably improved.

A polycapillary focusing optic collects a large solid angle of x rays from an x-ray source of small area at its input focus, guide them through the curved channels by multiple external total reflections, and focus them to the output focus.