Hostname: page-component-848d4c4894-v5vhk Total loading time: 0 Render date: 2024-06-27T21:24:05.251Z Has data issue: false hasContentIssue false
  • English
  • Français

ADF-STEM Imaging of Dopants and Defect Nanoclusters in Si

Published online by Cambridge University Press:  06 August 2003

P. M. Voyles ,
D. A. Muller  and
J. L. Grazul
P. M. Voyles
Affiliation:
Dept. of Materials Science and Engineering, University of Wisconsin – Madison, 1509 University Ave., Madison, WI, 53706-1595; voyles@engr.wisc.edu
D. A. Muller
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave., Murray Hill, NJ 07974-0636
J. L. Grazul
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave., Murray Hill, NJ 07974-0636

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 22 - 23
Copyright
Copyright © Microscopy Society of America 2003